{
    "tag": [
        "compiled"
    ],
    "id": "ocds-h6vhtk-036293-2022-08-24T15:26:14+01:00",
    "date": "2022-08-24T15:26:14+01:00",
    "ocid": "ocds-h6vhtk-036293",
    "initiationType": "tender",
    "tender": {
        "id": "QUB/2306/22",
        "legalBasis": {
            "id": "32014L0024",
            "scheme": "CELEX"
        },
        "title": "QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information",
        "status": "planned",
        "classification": {
            "scheme": "CPV",
            "id": "38000000",
            "description": "Laboratory, optical and precision equipments (excl. glasses)"
        },
        "mainProcurementCategory": "goods",
        "description": "Queen's University Belfast (\"Queen's\") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen's. At present we have a technical requirement for an instrument that includes;- 1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2. A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3. A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4. An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity. - 5. A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers.",
        "lots": [
            {
                "id": "1",
                "description": "Please refer to the Published RFI Documentation",
                "status": "planned"
            }
        ],
        "items": [
            {
                "id": "1",
                "deliveryAddresses": [
                    {
                        "region": "UKN06"
                    }
                ],
                "relatedLot": "1"
            }
        ],
        "communication": {
            "futureNoticeDate": "2022-10-31T00:00:00Z"
        },
        "submissionMethod": [
            "electronicSubmission",
            "written"
        ],
        "submissionMethodDetails": "https://in-tendhost.co.uk/queensuniversitybelfast/aspx/Home",
        "coveredBy": [
            "GPA"
        ]
    },
    "parties": [
        {
            "id": "GB-FTS-6917",
            "name": "Queen's University Belfast",
            "identifier": {
                "legalName": "Queen's University Belfast"
            },
            "address": {
                "streetAddress": "University Road",
                "locality": "Belfast",
                "region": "UKN06",
                "postalCode": "BT7 1NN",
                "countryName": "United Kingdom"
            },
            "contactPoint": {
                "name": "Emmett McCann",
                "email": "e.mccann@qub.ac.uk"
            },
            "roles": [
                "buyer"
            ],
            "details": {
                "url": "http://www.qub.ac.uk",
                "buyerProfile": "https://in-tendhost.co.uk/queensuniversitybelfast/aspx/Home",
                "classifications": [
                    {
                        "scheme": "TED_CA_TYPE",
                        "id": "BODY_PUBLIC",
                        "description": "Body governed by public law"
                    },
                    {
                        "scheme": "COFOG",
                        "id": "09",
                        "description": "Education"
                    }
                ]
            }
        },
        {
            "id": "GB-FTS-2124",
            "name": "Queen's University Belfast",
            "identifier": {
                "legalName": "Queen's University Belfast"
            },
            "address": {
                "locality": "Belfast",
                "countryName": "United Kingdom"
            },
            "roles": [
                "reviewBody",
                "mediationBody",
                "reviewContactPoint"
            ]
        }
    ],
    "buyer": {
        "id": "GB-FTS-6917",
        "name": "Queen's University Belfast"
    },
    "language": "en"
}