---
title: "Inductively-Coupled Plasma Reactively Ion Etching (ICP-RIE) System"
ocid: "ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964"
markdown_url: "https://d3tenders.com/contract/ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964.md"
json_url: "https://d3tenders.com/contract/ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964.json"
source: "Contracts Finder"
current_stage: "Tender"
buyer: "UNIVERSITY OF BRISTOL"
published: "2016-12-23"
---

# Inductively-Coupled Plasma Reactively Ion Etching (ICP-RIE) System

Buyer: UNIVERSITY OF BRISTOL  
Current stage: Tender  
OCID: ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964

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## Summary

The University of Bristol is currently seeking suppliers for an Inductively-Coupled Plasma Reactively Ion Etching (ICP-RIE) System, with a total procurement value of £350,000. This procurement falls under the category of laboratory, optical, and precision equipment. The tender is presently active and is expected to close on 30th January 2017. The successful system will be utilised in a class 10000 cleanroom environment, specifically for the definition of silicon-related waveguide structures for integrated quantum photonics applications, necessitating compatibility with existing facilities located in Bristol, South West, England.

This tender presents significant opportunities for businesses specialising in laboratory equipment, particularly those with experience in advanced etching systems and cleanroom technologies. Companies within the field of precision engineering, optics, and semiconductor manufacturing would be well-positioned to compete, especially small and medium enterprises that can demonstrate innovation and efficiency in their solutions. As the procurement method is open, it encourages a competitive bid environment, fostering potential growth and collaboration with a reputable institution like the University of Bristol.

## Notice

We want to acquire an Inductively-Coupled Plasma Reactively Ion Etching (ICP-RIE) system. The system should be able to etch the surface of samples utilising RIE physical-chemical mechanism. The System will be located in a class 10000 cleanroom space and will be operated by students and technical staff. The System should integrate smoothly with the existing facilities without any prejudice for the normal operation. The main purpose for the System is the definition of silicon and silicon-related waveguide structures for integrated quantum photonics applications. Such structures are typically defined on 6-inch silicon-on-insulator wafers with 220nm-thick crystalline silicon films. The system should excel at verticality (

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Contracts Finder |
| Latest notice | https://www.contractsfinder.service.gov.uk/Notice/870d8a6f-2bc5-4d5a-b5ee-9279806cac06 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | SME |
| Awardee scale | Not specified |
| All stages | Tender |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 23 Dec 2016 |
| Submission deadline | 30 Jan 2017 |
| Future notice date | Not specified |
| Award date | Not specified |
| Contract period | 20 Feb 2017 - 19 Feb 2022 |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £350,000 |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | Not specified |

## Status

| Field | Value |
| --- | --- |
| Tender status | Active |
| Lots status | Not specified |
| Awards status | Not specified |
| Contracts status | Not specified |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF BRISTOL |
| Locality | BRISTOL |
| Post town | Bristol |
| Postcode | BS2 8BB |
| Country | England |
| ITL 1 | TLK South West (England) |
| ITL 2 | TLK5 West of England |
| ITL 3 | TLK51 Bristol, City of |
| Local authority | Bristol, City of |
| Electoral ward | Central |
| Westminster constituency | Bristol Central |
| Delivery location | TLK South West (England) |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 23 Dec 2016 at 15:11 - Tender - Tender Notice - https://www.contractsfinder.service.gov.uk/Notice/870d8a6f-2bc5-4d5a-b5ee-9279806cac06

## Documents

- https://www.contractsfinder.service.gov.uk/Notice/870d8a6f-2bc5-4d5a-b5ee-9279806cac06
  23rd December 2016 - Opportunity notice on Contracts Finder

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-b5fd17-14d511db-1474-4ff8-a251-4a34060ec964.json.