---
title: "Plasma-Enhanced Chemical Vapour Deposition (PECVD) System"
ocid: "ocds-b5fd17-2300d51e-122b-4f6c-9c81-64d36a4ae8ae"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-b5fd17-2300d51e-122b-4f6c-9c81-64d36a4ae8ae"
markdown_url: "https://d3tenders.com/contract/ocds-b5fd17-2300d51e-122b-4f6c-9c81-64d36a4ae8ae.md"
json_url: "https://d3tenders.com/contract/ocds-b5fd17-2300d51e-122b-4f6c-9c81-64d36a4ae8ae.json"
source: "Contracts Finder"
current_stage: "Tender"
buyer: "UNIVERSITY OF BRISTOL"
published: "2016-12-23"
---

# Plasma-Enhanced Chemical Vapour Deposition (PECVD) System

Buyer: UNIVERSITY OF BRISTOL  
Current stage: Tender  
OCID: ocds-b5fd17-2300d51e-122b-4f6c-9c81-64d36a4ae8ae

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## Summary

The University of Bristol is currently seeking bids for a Plasma-Enhanced Chemical Vapour Deposition (PECVD) system, as part of their procurement process classified under the goods category, specifically laboratory, optical, and precision equipment. This open tender, published on 23rd December 2016, has a submission deadline of 30th January 2017. The selected system will be utilised in a class 10000 cleanroom environment, facilitating the creation of silicon photonic circuits and requiring high standards of uniformity and performance across various sample processes. The contract is expected to commence on 20th February 2017 and will remain effective until 19th February 2022, with a total estimated value of £180,000.

This procurement presents significant opportunities for businesses, particularly those specialising in advanced scientific equipment and technology. Companies with capabilities in the manufacturing and supply of lab equipment, especially those focused on thin film deposition systems and cleanroom operations, will find this tender particularly relevant. Small and medium-sized enterprises (SMEs) are encouraged to participate, as they may provide innovative solutions that meet the stringent requirements outlined by the University of Bristol. Engaging in this tender could lead to a fruitful partnership with a prestigious academic institution, expanding the suppliers' market presence and growth potential.

## Notice

We want to acquire a Plasma-Enhanced Chemical Vapour Deposition (PECVD) system. Your proposed System should be able to deposit thin films of silicon oxide, silicon nitride, combinations of both (silicon oxynitride) and also amorphous silicon. Your proposed System will be located in a class 10000 cleanroom space and will be operated by students and technical staff. Your proposed System should integrate smoothly with the existing facilities without any prejudice for the normal operation of the space. We envisage two main purposes for your proposed System: the deposition of dielectric cladding and mask layers for the fabrication of silicon photonic circuits based on SOI technology and the deposition of amorphous silicon films to be used as the guiding layer for photonic circuits. Your proposed System should excel at uniformity in film thickness and film composition not only over the surface of the samples (typically SOI wafers or pieces between 1cm in area and 6 inches in diameter) but also between consecutive processes on different samples. The metrics used to evaluate the performance will be uniformity, reproducibility, consistent film composition, low stress and low defect density both on accuracy and degree of control.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Contracts Finder |
| Latest notice | https://www.contractsfinder.service.gov.uk/Notice/ffb86dcd-2f06-4593-a3a1-8a3df5e20f49 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | SME |
| Awardee scale | Not specified |
| All stages | Tender |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 23 Dec 2016 |
| Submission deadline | 30 Jan 2017 |
| Future notice date | Not specified |
| Award date | Not specified |
| Contract period | 20 Feb 2017 - 19 Feb 2022 |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £180,000 |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | Not specified |

## Status

| Field | Value |
| --- | --- |
| Tender status | Active |
| Lots status | Not specified |
| Awards status | Not specified |
| Contracts status | Not specified |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF BRISTOL |
| Locality | BRISTOL |
| Post town | Bristol |
| Postcode | BS2 8BB |
| Country | England |
| ITL 1 | TLK South West (England) |
| ITL 2 | TLK5 West of England |
| ITL 3 | TLK51 Bristol, City of |
| Local authority | Bristol, City of |
| Electoral ward | Central |
| Westminster constituency | Bristol Central |
| Delivery location | TLK South West (England) |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 23 Dec 2016 at 15:16 - Tender - Tender Notice - https://www.contractsfinder.service.gov.uk/Notice/ffb86dcd-2f06-4593-a3a1-8a3df5e20f49

## Documents

- https://www.contractsfinder.service.gov.uk/Notice/ffb86dcd-2f06-4593-a3a1-8a3df5e20f49
  23rd December 2016 - Opportunity notice on Contracts Finder

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-b5fd17-2300d51e-122b-4f6c-9c81-64d36a4ae8ae. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-b5fd17-2300d51e-122b-4f6c-9c81-64d36a4ae8ae.json.