---
title: "Atomic Layer Etching for 2DM studies - AWARD"
ocid: "ocds-b5fd17-75837845-e2ba-4b10-b3e9-9278d3f376c3"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-b5fd17-75837845-e2ba-4b10-b3e9-9278d3f376c3"
markdown_url: "https://d3tenders.com/contract/ocds-b5fd17-75837845-e2ba-4b10-b3e9-9278d3f376c3.md"
json_url: "https://d3tenders.com/contract/ocds-b5fd17-75837845-e2ba-4b10-b3e9-9278d3f376c3.json"
source: "Contracts Finder"
current_stage: "Award"
buyer: "THE UNIVERSITY OF MANCHESTER"
published: "2024-10-08"
---

# Atomic Layer Etching for 2DM studies - AWARD

Buyer: THE UNIVERSITY OF MANCHESTER  
Current stage: Award  
OCID: ocds-b5fd17-75837845-e2ba-4b10-b3e9-9278d3f376c3

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## Summary

The University of Manchester has concluded a procurement process titled "Atomic Layer Etching for 2DM studies." This contract, under the "award" stage, focuses on laboratory, optical, and precision equipment, specifically dry-etching equipment. Located in the North West region, the procurement utilised an open procedure. The contract period runs from 17th May 2024 to 6th May 2025, with the procurement targeting small and medium-sized enterprises (SMEs). The project aims to enhance fabrication and characterisation processes at the National Graphene Institute, including advanced optoelectronics, nanofluidics, and quantum technologies applications.

This tender offers substantial growth opportunities for businesses specialising in laboratory and precision engineering equipment. Companies experienced in developing and optimising dry and plasma-based etching techniques would be well-suited to this contract, particularly those with expertise in atomic layer etching (ALE). The project is ideal for businesses aiming to collaborate with high-profile research institutions like the National Graphene Institute, thereby enhancing their portfolio and contributing to cutting-edge scientific advancements. The awarded supplier, SENTECH Instruments GmbH, was chosen for this project, reflecting the project's high standards and technical requirements.

## Notice

Background information on Project This tender is being run on behalf of Prof. Roman Gorbachev for the School of Physics and Astronomy/National Graphene Institute. Project Overview The National Graphene Institute (NGI) has a large cleanroom facility housing a range of state-of-the-art instruments dedicated to the fabrication and characterization of 2D related metamaterials and devices for a broad range of applications, from advanced optoelectronics to nanofluidics. An essential part of many fabrication processes is the capability to dry etch materials. A range of plasma-based dry etching techniques have been developed for 2D materials (2DM), primarily to completely remove specific regions in order to create a pattern defined by a lithographic mask. "Thinning down" of atomically thin 2DM by etching so far remains problematic, as the surface amorphization leads to complete loss of their unique properties. Subsequently, "soft-plasma" etching techniques were developed to approach layer-by-layer etching of various 2DM. These methods provide great control of the thickness, but they are not self-limiting in nature due to associated physical etching processes and thus require careful optimization of many dry etching parameters. Even then, damage to the underlaying materials is frequent, limiting its use for nanotechnology applications that demand the highest crystal quality (quantum technologies, sensors, etc.). To overcome these limitations, this project aims to study the use of Atomic Layer Etching (ALE) of 2DM, using multi-step, self-limiting reactions to allow precise (layer-by-layer), highly selective and low damage etching. The proposed platform must include the capability to perform ALE in addition to the conventional inductively coupled plasma (ICP) and/or reactive ion etching (RIE) processes, with fast recipe control and fine tuning of low bias powers. Apart from "thinning down" of 2DM, more controllable and reliable ICP/RIE will also benefit a range of already existing processes in terms of reproducibility, uniformity and control, such as clean layer transfers for heterostructure fabrication and synthesis of high-quality ohmic contacts to 2DM.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Contracts Finder |
| Latest notice | https://www.contractsfinder.service.gov.uk/Notice/065154db-e623-4ebc-9714-a3ecd9ea6b5c |
| Notice type | Award Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | SME |
| Awardee scale | Not specified |
| All stages | Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 8 Oct 2024 |
| Submission deadline | 7 May 2024 |
| Future notice date | Not specified |
| Award date | 7 Oct 2024 |
| Contract period | 16 May 2024 - 6 May 2025 |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | Not specified |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | Not specified |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Not specified |
| Awards status | Active |
| Contracts status | Not specified |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | THE UNIVERSITY OF MANCHESTER |
| Locality | MANCHESTER |
| Post town | Manchester |
| Postcode | M13 9PL |
| Country | England |
| ITL 1 | TLD North West (England) |
| ITL 2 | TLD3 Greater Manchester |
| ITL 3 | TLD33 Manchester |
| Local authority | Manchester |
| Electoral ward | Hulme |
| Westminster constituency | Manchester Rusholme |
| Delivery location | TLD North West (England) |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | SENTECH INSTRUMENTS |

## CPV Codes

### Divisions

- 22 - Printed matter and related products
- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 22520000 - Dry-etching equipment
- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 8 Oct 2024 at 12:58 - Award - Award Notice - https://www.contractsfinder.service.gov.uk/Notice/065154db-e623-4ebc-9714-a3ecd9ea6b5c

## Documents

- https://www.contractsfinder.service.gov.uk/Notice/065154db-e623-4ebc-9714-a3ecd9ea6b5c
  8th October 2024 - Awarded contract notice on Contracts Finder

## Provenance

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