--- title: "Atomic Layer Etching for 2DM studies" ocid: "ocds-b5fd17-e48529c2-2e54-450d-ae7c-2fa4b7403479" canonical_url: "https://d3tenders.com/contract/?ocid=ocds-b5fd17-e48529c2-2e54-450d-ae7c-2fa4b7403479" markdown_url: "https://d3tenders.com/contract/ocds-b5fd17-e48529c2-2e54-450d-ae7c-2fa4b7403479.md" json_url: "https://d3tenders.com/contract/ocds-b5fd17-e48529c2-2e54-450d-ae7c-2fa4b7403479.json" source: "Contracts Finder" current_stage: "Tender" buyer: "THE UNIVERSITY OF MANCHESTER" published: "2024-04-04" --- # Atomic Layer Etching for 2DM studies Buyer: THE UNIVERSITY OF MANCHESTER Current stage: Tender OCID: ocds-b5fd17-e48529c2-2e54-450d-ae7c-2fa4b7403479 [View canonical contract page](https://d3tenders.com/contract/?ocid=ocds-b5fd17-e48529c2-2e54-450d-ae7c-2fa4b7403479) [Download OCDS JSON](https://d3tenders.com/contract/ocds-b5fd17-e48529c2-2e54-450d-ae7c-2fa4b7403479.json) ## Summary The University of Manchester is inviting tenders for the procurement of "Atomic Layer Etching for 2DM studies" in the laboratory, optical and precision equipment category. This tender, initiated by Prof. Roman Gorbachev for the School of Physics and Astronomy/National Graphene Institute, aims to advance the fabrication and characterization of 2D metamaterials. The tender deadline is 7th May 2024, with a contract period starting on 17th May 2024 and ending on 6th May 2025. The tender is open for SMEs and falls under the goods procurement category. This tender by The University of Manchester presents a lucrative business opportunity for companies specialised in dry-etching equipment, particularly those focusing on advanced optoelectronics and nanofluidics. Businesses capable of providing equipment for precise, highly selective, and low-damage etching processes are well-suited to compete. The procurement process is currently in the tender stage, offering potential revenue and growth prospects for suitable suppliers in the North West region of the United Kingdom. ## Notice Background information on Project This tender is being run on behalf of Prof. Roman Gorbachev for the School of Physics and Astronomy/National Graphene Institute. Project Overview The National Graphene Institute (NGI) has a large cleanroom facility housing a range of state-of-the-art instruments dedicated to the fabrication and characterization of 2D related metamaterials and devices for a broad range of applications, from advanced optoelectronics to nanofluidics. An essential part of many fabrication processes is the capability to dry etch materials. A range of plasma-based dry etching techniques have been developed for 2D materials (2DM), primarily to completely remove specific regions in order to create a pattern defined by a lithographic mask. "Thinning down" of atomically thin 2DM by etching so far remains problematic, as the surface amorphization leads to complete loss of their unique properties. Subsequently, "soft-plasma" etching techniques were developed to approach layer-by-layer etching of various 2DM. These methods provide great control of the thickness, but they are not self-limiting in nature due to associated physical etching processes and thus require careful optimization of many dry etching parameters. Even then, damage to the underlaying materials is frequent, limiting its use for nanotechnology applications that demand the highest crystal quality (quantum technologies, sensors, etc.). To overcome these limitations, this project aims to study the use of Atomic Layer Etching (ALE) of 2DM, using multi-step, self-limiting reactions to allow precise (layer-by-layer), highly selective and low damage etching. The proposed platform must include the capability to perform ALE in addition to the conventional inductively coupled plasma (ICP) and/or reactive ion etching (RIE) processes, with fast recipe control and fine tuning of low bias powers. Apart from "thinning down" of 2DM, more controllable and reliable ICP/RIE will also benefit a range of already existing processes in terms of reproducibility, uniformity and control, such as clean layer transfers for heterostructure fabrication and synthesis of high-quality ohmic contacts to 2DM. Additional information: Information, formalities and necessary requirements to be met will be set out in the procurement documents, all of which are available via the University's procurement portal In-Tend - https://in-tendhost.co.uk/manchesteruniversity Funding Type (WEFO or EU) : EPSRC Is a Recurrent Procurement Type? : No ## Key Details | Field | Value | | --- | --- | | Publication source | Contracts Finder | | Latest notice | https://www.contractsfinder.service.gov.uk/Notice/1bc7e561-86b5-46f8-a3e6-782bdd0b70e1 | | Notice type | Tender Notice | | Procurement type | Standard | | Procurement category | Goods | | Procurement method | Open | | Procurement method details | Open procedure (above threshold) | | Tender suitability | SME | | Awardee scale | Not specified | | All stages | Tender | ## Dates | Field | Value | | --- | --- | | Publication date | 4 Apr 2024 | | Submission deadline | 7 May 2024 | | Future notice date | Not specified | | Award date | Not specified | | Contract period | 17 May 2024 - 6 May 2025 | | Recurrence | Not specified | ## Values | Field | Value | | --- | --- | | Tender value | Not specified | | Lots value | Not specified | | Awards value | Not specified | | Contracts value | Not specified | ## Status | Field | Value | | --- | --- | | Tender status | Active | | Lots status | Not specified | | Awards status | Not specified | | Contracts status | Not specified | ## Buyer | Field | Value | | --- | --- | | Main buyer | THE UNIVERSITY OF MANCHESTER | | Locality | MANCHESTER | | Post town | Manchester | | Postcode | M13 9PL | | Country | England | | ITL 1 | TLD North West (England) | | ITL 2 | TLD3 Greater Manchester | | ITL 3 | TLD33 Manchester | | Local authority | Manchester | | Electoral ward | Hulme | | Westminster constituency | Manchester Rusholme | | Delivery location | TLD North West (England) | ## CPV Codes ### Divisions - 22 - Printed matter and related products - 38 - Laboratory, optical and precision equipments (excl. glasses) ### Codes - 22520000 - Dry-etching equipment - 38000000 - Laboratory, optical and precision equipments (excl. glasses) ## Release History - 4 Apr 2024 at 09:33 - Tender - Tender Notice - https://www.contractsfinder.service.gov.uk/Notice/1bc7e561-86b5-46f8-a3e6-782bdd0b70e1 ## Documents - https://www.contractsfinder.service.gov.uk/Notice/1bc7e561-86b5-46f8-a3e6-782bdd0b70e1 4th April 2024 - Opportunity notice on Contracts Finder - https://in-tendhost.co.uk/manchesteruniversity/aspx/ Additional information on how to apply for this contract ## Notice URLs - https://in-tendhost.co.uk/manchesteruniversity ## Provenance This Markdown file is an alternate public rendering of the D3 Tenders contract record. 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