---
title: "200mm High Performance Electron Beam Lithography System"
ocid: "ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d"
markdown_url: "https://d3tenders.com/contract/ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d.md"
json_url: "https://d3tenders.com/contract/ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d.json"
source: "Contracts Finder"
current_stage: "Award"
buyer: "UNIVERSITY OF SOUTHAMPTON"
published: "2023-01-17"
---

# 200mm High Performance Electron Beam Lithography System

Buyer: UNIVERSITY OF SOUTHAMPTON  
Current stage: Award  
OCID: ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d

[View canonical contract page](https://d3tenders.com/contract/?ocid=ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d)  
[Download OCDS JSON](https://d3tenders.com/contract/ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d.json)

## Summary

The University of Southampton has awarded a contract for a 200mm High Performance Electron Beam Lithography System. The procurement process was open above threshold, with a contract value of £5,000,000. The tender period ended on October 19, 2022. The contract runs from November 18, 2022, to November 17, 2038. This opportunity falls under the goods category and is suitable for small and medium-sized enterprises as well as voluntary, community, and social enterprises.

This tender provides an opportunity for businesses in the Laboratory, optical, and precision equipment industry to compete for supplying the Electron Beam Lithography System to the University of Southampton. Companies interested in nanometer scale lithography services catering to academic and research communities would find this tender suitable. The University aims to engage with suppliers through an open procurement method to support innovation and research in these high-tech equipment acquisitions.

## Notice

The University is looking to procure a new 200mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide a state-of-the-art nanometer scale lithography service. The user base for the new instrument will be approximately 40 users. Tenders or requests to participate must be submitted electronically via the University's electronic tendering portal, In Tend, found at the following address: https://in-tendhost.co.uk/universityofsouthampton/aspx/home

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Contracts Finder |
| Latest notice | https://www.contractsfinder.service.gov.uk/Notice/87b0e3e1-b635-4fca-a263-efa9d6e43c24 |
| Notice type | Award Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure (above threshold) |
| Tender suitability | SME, VCSE |
| Awardee scale | Large |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 17 Jan 2023 |
| Submission deadline | 19 Oct 2022 |
| Future notice date | Not specified |
| Award date | 22 Dec 2022 |
| Contract period | 17 Jan 2023 - 16 Jan 2039 |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £5,000,000 |
| Lots value | Not specified |
| Awards value | £3,138,991 |
| Contracts value | Not specified |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Not specified |
| Awards status | Active |
| Contracts status | Not specified |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF SOUTHAMPTON |
| Locality | SOUTHAMPTON |
| Post town | Southampton |
| Postcode | SO17 1BJ |
| Country | England |
| ITL 1 | TLJ South East (England) |
| ITL 2 | TLJ3 Hampshire and Isle of Wight |
| ITL 3 | TLJ32 Southampton |
| Local authority | Southampton |
| Electoral ward | Portswood |
| Westminster constituency | Southampton Test |
| Delivery location | Not specified |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | JEOL(U.K.)LIMITED |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 17 Jan 2023 at 17:17 - Award - Award Notice - https://www.contractsfinder.service.gov.uk/Notice/87b0e3e1-b635-4fca-a263-efa9d6e43c24
- 11 Oct 2022 at 15:09 - TenderAmendment - Tender Notice - https://www.contractsfinder.service.gov.uk/Notice/5b66e6a9-8ca0-4018-9233-a78b4ebfb962
- 20 Sep 2022 at 13:41 - TenderAmendment - Tender Notice - https://www.contractsfinder.service.gov.uk/Notice/5b66e6a9-8ca0-4018-9233-a78b4ebfb962
- 24 Aug 2022 at 10:54 - Tender - Tender Notice - https://www.contractsfinder.service.gov.uk/Notice/5b66e6a9-8ca0-4018-9233-a78b4ebfb962

## Documents

- https://www.contractsfinder.service.gov.uk/Notice/87b0e3e1-b635-4fca-a263-efa9d6e43c24
  17th January 2023 - Awarded contract notice on Contracts Finder
- https://www.contractsfinder.service.gov.uk/Notice/5b66e6a9-8ca0-4018-9233-a78b4ebfb962
  11th October 2022 - Opportunity notice on Contracts Finder

## Notice URLs

- https://in-tendhost.co.uk/universityofsouthampton/aspx/home
- https://www.southampton.ac.uk/

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-b5fd17-fb32f4cc-f9ec-43b5-a8d4-e0d4c5c3ed8d.json.