---
title: "School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System"
ocid: "ocds-h6vhtk-028ca4"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-h6vhtk-028ca4"
markdown_url: "https://d3tenders.com/contract/ocds-h6vhtk-028ca4.md"
json_url: "https://d3tenders.com/contract/ocds-h6vhtk-028ca4.json"
source: "Find A Tender Service"
current_stage: "Award"
buyer: "UNIVERSITY OF ST ANDREWS"
published: "2021-06-01"
---

# School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System

Buyer: UNIVERSITY OF ST ANDREWS  
Current stage: Award  
OCID: ocds-h6vhtk-028ca4

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## Summary

The University of St Andrews is currently in the tender stage of procurement for an Inductively Coupled Plasma Reactive-Ion Etching system, classified under the goods category, specifically for dry-etching equipment. This procurement is taking place in St Andrews, UK, and the deadline for bid submissions was on 24th February 2021. The tender process follows an open procurement method, and the successful bidder will be awarded the contract based on specific criteria, focusing on quality (65%) and cost (35%).

This tender presents a significant opportunity for businesses specialising in high-tech manufacturing and scientific equipment, particularly those with expertise in vacuum technology and cleanroom-compatible machinery. Suppliers capable of providing advanced etching systems, along with relevant accessories such as vacuum pumps, would be well-positioned to compete. Given the open nature of the tender and the emphasis on quality, innovative SMEs, as well as larger firms with proven track records in similar industries, are encouraged to engage with this opportunity to facilitate their growth within the academic and research sectors.

## Notice

The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.

### Lot Information

Lot 1

We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for high quality etching (high etch rates, side wall angle control and low sidewall roughness) of - silicon, - silicon compounds (e.g. SiC, Si3N4), - compound III-V & compound II-VI semiconductors (e.g. AlGaInP, InGaP, AlGaAs, InP, GaAs, GaN, etc.), - dielectrics (e.g. ZnO2, TiO, ITO, Al2O3, ZrO2, etc.), - metals (e.g. Cr, Al, Ti, Au, W, Pt, etc.) and - organics (e.g. resists like SU8, S1818, etc and polymers like parylene, PS etc) containing an inductively coupled plasma (ICP) source for the generation of plasmas with high ion density, low ion energy and narrow energy distribution (ion energy and ion density are separately controllable via an included bias generator). The ICP-RIE etcher should be fully clean room-compatible. Wafers should be loaded into the etching chamber via a vacuum load lock for process stability, short process cycle times and safety issues. The substrate electrode should be He back-side cooled for dynamic, direct and very efficient temperature control of the substrate in a range of -20 degC to 150 degC, which may require the attachment of an external chiller (to be included in quotation). The etcher should be equipped with a laser interferometer to allow for live detection of the etching progress, and optionally also with an optical emission spectrometer for monitoring of chamber condition. The etcher should be compatible with fluorinated and chlorinated gases. The entire system should be operated from a PC (to be included in delivery). Additional information: All Tenders for the University of St Andrews are administered through our e-Tendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Find A Tender Service |
| Latest notice | https://www.find-tender.service.gov.uk/Notice/012163-2021 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | SME |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 1 Jun 2021 |
| Submission deadline | 24 Feb 2021 |
| Future notice date | Not specified |
| Award date | 24 May 2021 |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | Not specified |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | £273,125 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Cancelled |
| Awards status | Active |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF ST ANDREWS |
| Locality | GUARDBRIDGE |
| Post town | Kirkcaldy |
| Postcode | KY16 0US |
| Country | Scotland |
| ITL 1 | TLM Scotland |
| ITL 2 | TLM0 Eastern Scotland |
| ITL 3 | TLM01 Clackmannanshire and Fife |
| Local authority | Fife |
| Electoral ward | Tay Bridgehead |
| Westminster constituency | North East Fife |
| Delivery location | TLM72 Clackmannanshire and Fife |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | SENTECH INSTRUMENTS |

## CPV Codes

### Divisions

- 22 - Printed matter and related products
- 42 - Industrial machinery

### Codes

- 22520000 - Dry-etching equipment
- 42122450 - Vacuum pumps
- 42124300 - Parts of air or vacuum pumps, of air or gas compressors

## Release History

- 1 Jun 2021 at 11:04 - Award - Award Notice - https://www.find-tender.service.gov.uk/Notice/012163-2021
- 22 Jan 2021 at 15:16 - Tender - Tender Notice - https://www.find-tender.service.gov.uk/Notice/001358-2021

## Notice URLs

- http://www.st-andrews.ac.uk/procurement/
- https://in-tendhost.co.uk/universityofstandrews
- https://intendhost.co.uk/universityofstandrews
- https://www.publiccontractsscotland.gov.uk/search/Search_AuthProfile.aspx?ID=AA00111

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-h6vhtk-028ca4. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-h6vhtk-028ca4.json.