---
title: "Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching"
ocid: "ocds-h6vhtk-029388"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-h6vhtk-029388"
markdown_url: "https://d3tenders.com/contract/ocds-h6vhtk-029388.md"
json_url: "https://d3tenders.com/contract/ocds-h6vhtk-029388.json"
source: "Find A Tender Service"
current_stage: "Award"
buyer: "SWANSEA UNIVERSITY"
published: "2021-06-21"
---

# Supply of a Plasma Etch Tool for Silicon Carbide (SiC) Etching

Buyer: SWANSEA UNIVERSITY  
Current stage: Award  
OCID: ocds-h6vhtk-029388

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## Summary

Swansea University is conducting a tender for the supply of a Plasma Etch Tool specifically designed for Silicon Carbide (SiC) etching, with a total contract value of £1,000,000. The procurement is categorised under "goods" and falls within the laboratory, optical, and precision equipment industry. The tender process is currently active, with a bid submission deadline set for 18th March 2021, and successful deliveries to be made to Newport Wafer Fab. This tender employs an open procurement method.

This opportunity presents significant growth potential for companies involved in the manufacture and supply of high-precision laboratory equipment, particularly those that specialise in etching technologies. Suppliers offering reliable, innovative solutions and robust after-sales support will be well-positioned to compete effectively in this tender. Moreover, businesses with expertise in advanced semiconductor fabrication tools or related technologies are encouraged to consider participating.

## Notice

This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide. The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equipment is therefore paramount to maintaining, supporting and complimenting the wide array of experimental work that will be conducted within the facility.

### Lot Information

Lot 1

This Tender Specification is for the supply and delivery of a Plasma Etch Tool for SiC etching. In procuring this system, the University is seeking to augment its well-established existing plasma etch and deposition tool set, expanding the capabilities that the CISM will be able to provide. The new tool will be of strategic importance in delivering both frontside SiC etch capability for power MOSFET trench applications, and backside SiC via etch capability for GaN-on-SiC device applications. Reliability of the equipment is therefore paramount to maintaining, supporting and complimenting the wide array of experimental work that will be conducted within the facility. Additional information: Funding for this procurement has been secured from the Driving the Electric Revolution (DER) Industrialisation Centres Programme via Innovate UK.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Find A Tender Service |
| Latest notice | https://www.find-tender.service.gov.uk/Notice/014061-2021 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | SME |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 21 Jun 2021 |
| Submission deadline | 18 Mar 2021 |
| Future notice date | Not specified |
| Award date | 16 May 2021 |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £1,000,000 |
| Lots value | £1,000,000 |
| Awards value | Not specified |
| Contracts value | Not specified |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Cancelled |
| Awards status | Active |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | SWANSEA UNIVERSITY |
| Locality | SWANSEA |
| Post town | Swansea |
| Postcode | SA2 8PP |
| Country | Wales |
| ITL 1 | TLL Wales |
| ITL 2 | TLL4 Mid and South West Wales |
| ITL 3 | TLL43 Swansea |
| Local authority | Swansea |
| Electoral ward | Sketty |
| Westminster constituency | Swansea West |
| Delivery location | TLL Wales |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | SPTS TECHNOLOGIES |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)
- 39 - Furniture (incl. office furniture), furnishings, domestic appliances (excl. lighting) and cleaning products

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)
- 38900000 - Miscellaneous evaluation or testing instruments
- 38970000 - Research, testing and scientific technical simulator
- 39180000 - Laboratory furniture

## Release History

- 21 Jun 2021 at 14:15 - Award - Award Notice - https://www.find-tender.service.gov.uk/Notice/014061-2021
- 16 Feb 2021 at 12:48 - Tender - Tender Notice - https://www.find-tender.service.gov.uk/Notice/003105-2021

## Notice URLs

- http://www.swansea.ac.uk
- https://etenderwales.bravosolution.co.uk/
- https://www.sell2wales.gov.wales/search/Search_AuthProfile.aspx?ID=AA0345

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-h6vhtk-029388. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-h6vhtk-029388.json.