---
title: "202122/547 Supply of up to four dry etch and deposition systems"
ocid: "ocds-h6vhtk-031776"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-h6vhtk-031776"
markdown_url: "https://d3tenders.com/contract/ocds-h6vhtk-031776.md"
json_url: "https://d3tenders.com/contract/ocds-h6vhtk-031776.json"
source: "Find A Tender Service"
current_stage: "Award"
buyer: "UNIVERSITY OF LEEDS"
published: "2023-08-24"
---

# 202122/547 Supply of up to four dry etch and deposition systems

Buyer: UNIVERSITY OF LEEDS  
Current stage: Award  
OCID: ocds-h6vhtk-031776

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## Summary

The University of Leeds has completed the procurement process for the award of four dry etch and deposition systems. The procurement stage was selective, following a competitive procedure with negotiation. The buyer, University of Leeds, located in Leeds, awarded the contract to Oxford Instruments. The contract was signed on 26th May 2023, with a total value of £2,155,581. The industry category for this procurement is goods, specifically dry-etching equipment. The University of Leeds used a competitive procedure with negotiation as the procurement method.

This tender for the supply of dry etch and deposition systems by the University of Leeds provides business growth opportunities for suppliers in the dry-etching equipment industry. Businesses well-suited to compete in such tenders are those specialising in providing dry etch and deposition systems. By engaging with this procurement opportunity, businesses can access contracts from the University of Leeds and potentially expand their market presence within the goods category, focusing on dry-etching equipment specifically.

## Notice

NOTICE OF AWARD OF four dry etch and deposition systems, specifically: *A Deep-Silicon Reactive Ion Etcher (D-RIE) *An Inductively Coupled Plasma-RIE (ICP-RIE) *A parallel plate RIE *A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD)

### Lot Information

Lot 1

NOTICE OF AWARD OF four dry etch and deposition systems, specifically: *A Deep-Silicon Reactive Ion Etcher (D-RIE) *An Inductively Coupled Plasma-RIE (ICP-RIE) *A parallel plate RIE *A High-Density Plasma-enhanced Chemical Vapour Deposition system (HDP-CVD) Additional information: To respond to this opportunity please click here: https://neupc.delta-esourcing.com/respond/ZA5CH77BT9

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Find A Tender Service |
| Latest notice | https://www.find-tender.service.gov.uk/Notice/024931-2023 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Selective |
| Procurement method details | Competitive procedure with negotiation |
| Tender suitability | Not specified |
| Awardee scale | Large |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 24 Aug 2023 |
| Submission deadline | 16 Mar 2022 |
| Future notice date | Not specified |
| Award date | 25 May 2023 |
| Contract period | 30 Jul 2022 - 31 Jul 2023 |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £25,000,000 |
| Lots value | £25,000,000 |
| Awards value | Not specified |
| Contracts value | £2,155,581 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Cancelled |
| Awards status | Active |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF LEEDS |
| Locality | LEEDS |
| Post town | Leeds |
| Postcode | LS2 9JT |
| Country | England |
| ITL 1 | TLE Yorkshire and The Humber |
| ITL 2 | TLE4 West Yorkshire |
| ITL 3 | TLE42 Leeds |
| Local authority | Leeds |
| Electoral ward | Little London & Woodhouse |
| Westminster constituency | Leeds Central and Headingley |
| Delivery location | TLE42 Leeds |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | OXFORD INSTRUMENTS |

## CPV Codes

### Divisions

- 22 - Printed matter and related products

### Codes

- 22520000 - Dry-etching equipment

## Release History

- 24 Aug 2023 at 11:06 - Award - Award Notice - https://www.find-tender.service.gov.uk/Notice/024931-2023
- 15 Feb 2022 at 16:14 - Tender - Tender Notice - https://www.find-tender.service.gov.uk/Notice/004314-2022

## Notice URLs

- http://www.leeds.ac.uk
- https://neupc.delta-esourcing.com/delta/viewNotice.html?noticeId=804651228
- https://neupc.delta-esourcing.com/respond/ZA5CH77BT9
- https://www.delta-esourcing.com/tenders/UK-UK-Leeds:-Dry-etching-equipment./ZA5CH77BT9

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-h6vhtk-031776. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-h6vhtk-031776.json.