---
title: "Provision of a 300mm Capable High Throughput Electron Beam Lithography System"
ocid: "ocds-h6vhtk-0347a3"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-h6vhtk-0347a3"
markdown_url: "https://d3tenders.com/contract/ocds-h6vhtk-0347a3.md"
json_url: "https://d3tenders.com/contract/ocds-h6vhtk-0347a3.json"
source: "Find A Tender Service"
current_stage: "Award"
buyer: "UNIVERSITY OF SOUTHAMPTON"
published: "2022-12-12"
---

# Provision of a 300mm Capable High Throughput Electron Beam Lithography System

Buyer: UNIVERSITY OF SOUTHAMPTON  
Current stage: Award  
OCID: ocds-h6vhtk-0347a3

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## Summary

The University of Southampton initiated a tender for the provision of a 300mm Capable High Throughput Electron Beam Lithography System. The procurement involves acquiring a new system for the Southampton Nanofabrication Centre, targeting researchers, students, and the wider UK academic community. The University plans to sign a contract for up to sixteen years, including warranties and service agreements. The estimated value of the solution ranges from £6m to £7m excluding VAT. The University is using the open procedure for this procurement.

This tender opportunity presents a potential business growth opportunity for suppliers in the laboratory, optical, and precision equipment industry. Companies offering high-quality electron beam lithography systems with strong technical support, delivery capabilities, and competitive pricing stand to compete effectively. The University's long-term contract arrangement provides stability and potential for sustained business partnerships. Interested businesses should consider the detailed technical criteria and financial requirements outlined in the tender to align their proposals with the University's needs.

## Notice

The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service.

### Lot Information

Lot 1

The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities, housed in a purpose built, 820m2 cleanroom in the Mountbatten Complex at the University of Southampton. One of the premier cleanrooms in Europe, the Centre has a uniquely broad range of technologies, combining traditional and novel top down fabrication with state-of-the-art bottom up fabrication. This allows us to develop and produce a wide range of devices in diverse fields such as electronics, nanotechnology and bio nanotechnology and incorporate them into an equally comprehensive array of nano and microsystems for analysis and use. The characterisation capability is similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis. The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service. The instrument to be procured will directly replace a JEOL JBX9300FS which suffered a failure in 2021 (the removal of which is an optional requirement of this tender). The user base for the machine is approximately 40 users. The University is conducting this procurement using the open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods and services described in the Specification. The University proposes to enter into a Contract for up to sixteen years. This will be the maximum contract period, including any potential extensions with the successful tenderer. This contract term will comprise: The initial contract period, comprising; * A period of twelve months to cover the estimated lead time of the instrument, * A two-year warranty period, and * A four-year comprehensive service agreement Followed by * A further nine x twelve-month optional extension periods to the comprehensive service agreement, subject to the satisfactory performance and at the discretion of the University. The contract will be effective on signing. The two-year warranty period and four-year service agreement will run from the date of delivery and acceptance of the equipment, estimated to be twelve months after the commencement of the contract. Extensions, if agreed, shall run from the expiry of the initial service agreement period (year seven), if so agreed by the University. The Contract will run for a maximum of sixteen years up until September 2038 (actual date is TBC following contract award). The anticipated total value of the proposed solution including all of the extension periods shown above should be within the range of PS6m to PS7m excluding VAT. It is anticipated that the cost of the instrument itself and core services related to its installation and commissioning will be in the value of PS4m to PS5m excluding VAT. All related components, delivery, installation, commissioning, training, services, and maintenance MUST be included within the proposal. Details of current expenditure or potential future uptake are given as a guide base on past purchasing and current planning to assist you in the preparation of your Tender. They should not be interpreted as an undertaking to purchase any goods or services to any particular value and do not form part of the Contract. This procurement is not suitable for splitting into lots. The risk of dividing the requirement into Lots would render the execution of the contract excessively technically difficult, not cost effective and would undermine proper execution of the contract.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Find A Tender Service |
| Latest notice | https://www.find-tender.service.gov.uk/Notice/035010-2022 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | Large |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 12 Dec 2022 |
| Submission deadline | 18 Jul 2022 |
| Future notice date | Not specified |
| Award date | 8 Nov 2022 |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £7,000,000 |
| Lots value | £7,000,000 |
| Awards value | Not specified |
| Contracts value | £7,461,509 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Cancelled |
| Awards status | Active |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF SOUTHAMPTON |
| Locality | SOUTHAMPTON |
| Post town | Southampton |
| Postcode | SO17 1BJ |
| Country | England |
| ITL 1 | TLJ South East (England) |
| ITL 2 | TLJ3 Hampshire and Isle of Wight |
| ITL 3 | TLJ32 Southampton |
| Local authority | Southampton |
| Electoral ward | Portswood |
| Westminster constituency | Southampton Test |
| Delivery location | TLJ South East (England) |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | JEOL (UK |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 12 Dec 2022 at 08:18 - Award - Award Notice - https://www.find-tender.service.gov.uk/Notice/035010-2022
- 5 Jul 2022 at 13:58 - TenderUpdate - Tender Notice - https://www.find-tender.service.gov.uk/Notice/018355-2022
- 17 Jun 2022 at 10:20 - Tender - Tender Notice - https://www.find-tender.service.gov.uk/Notice/016638-2022

## Notice URLs

- http://www.southampton.ac.uk
- https://in-tendhost.co.uk/universityofsouthampton/aspx/Home
- https://intendhost.co.uk/
- https://www.southampton.ac.uk/

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-h6vhtk-0347a3. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-h6vhtk-0347a3.json.