---
title: "QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information"
ocid: "ocds-h6vhtk-036293"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-h6vhtk-036293"
markdown_url: "https://d3tenders.com/contract/ocds-h6vhtk-036293.md"
json_url: "https://d3tenders.com/contract/ocds-h6vhtk-036293.json"
source: "Find A Tender Service"
current_stage: "Planning"
buyer: "QUEEN'S UNIVERSITY BELFAST"
published: "2022-08-24"
---

# QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information

Buyer: QUEEN'S UNIVERSITY BELFAST  
Current stage: Planning  
OCID: ocds-h6vhtk-036293

[View canonical contract page](https://d3tenders.com/contract/?ocid=ocds-h6vhtk-036293)  
[Download OCDS JSON](https://d3tenders.com/contract/ocds-h6vhtk-036293.json)

## Summary

The Queen's University Belfast is planning a procurement process titled "QUB/2306/22 Supply, Delivery, Installation, and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information" in the goods category related to laboratory, optical, and precision equipment. The university is seeking providers for a Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project. The key deadline for future notice is 31st October 2022. The procurement is at the planning stage and will involve electronic and written submission methods.

This tender by Queen's University Belfast presents a business opportunity for providers of Thin Film Deposition Cluster Tools. Businesses specializing in wafer handling systems, Physical Vapour Deposition process modules, Atomic layer Deposition modules, and glove-box/transfer modules would be well-suited to compete. The procurement process offers potential for growth in the precision equipment industry, particularly for companies with expertise in manufacturing and supplying high-tech scientific instruments.

## Notice

Queen's University Belfast ("Queen's") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen's. At present we have a technical requirement for an instrument that includes;- 1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2. A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3. A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4. An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity. - 5. A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Find A Tender Service |
| Latest notice | https://www.find-tender.service.gov.uk/Notice/023653-2022 |
| Notice type | Planning Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Not Specified |
| Procurement method details | Not specified |
| Tender suitability | Not specified |
| Awardee scale | Not specified |
| All stages | Planning |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 24 Aug 2022 |
| Submission deadline | Not specified |
| Future notice date | 31 Oct 2022 |
| Award date | Not specified |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | Not specified |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | Not specified |

## Status

| Field | Value |
| --- | --- |
| Tender status | Planned |
| Lots status | Planned |
| Awards status | Not specified |
| Contracts status | Not specified |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | QUEEN'S UNIVERSITY BELFAST |
| Locality | BELFAST |
| Post town | Northern Ireland |
| Postcode | BT7 1NN |
| Country | Northern Ireland |
| ITL 1 | TLN Northern Ireland |
| ITL 2 | TLN0 Northern Ireland |
| ITL 3 | TLN06 Belfast |
| Local authority | Belfast |
| Electoral ward | Central |
| Westminster constituency | Belfast South and Mid Down |
| Delivery location | TLN06 Belfast |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 24 Aug 2022 at 14:26 - Planning - Planning Notice - https://www.find-tender.service.gov.uk/Notice/023653-2022

## Notice URLs

- http://www.qub.ac.uk
- https://in-tendhost.co.uk/queensuniversitybelfast/aspx/Home

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-h6vhtk-036293. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-h6vhtk-036293.json.