---
title: "Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots."
ocid: "ocds-h6vhtk-038941"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-h6vhtk-038941"
markdown_url: "https://d3tenders.com/contract/ocds-h6vhtk-038941.md"
json_url: "https://d3tenders.com/contract/ocds-h6vhtk-038941.json"
source: "Find A Tender Service"
current_stage: "Award"
buyer: "UNIVERSITY OF SHEFFIELD"
published: "2023-09-26"
---

# Supply of one off Reactive Ion Etcher (RIE) and/or a one off Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots.

Buyer: UNIVERSITY OF SHEFFIELD  
Current stage: Award  
OCID: ocds-h6vhtk-038941

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## Summary

The University of Sheffield has completed a tender process for the supply of one off Reactive Ion Etcher (RIE) and/or Inductively Coupled Plasma Reactive Ion Etcher (ICPRIE) in two lots. This procurement falls under the goods category and involves the Department of Electronic and Electrical Engineering at the University of Sheffield. The contract period is set to start on October 2, 2023, and end on July 15, 2024. The awarded supplier for lot 1 is Oxford Instruments Nanotechnology Tools Ltd.

This procurement opportunity offers businesses in the laboratory, optical, and precision equipment industry a chance to supply specific machinery to the University of Sheffield. Businesses dealing with industrial machinery and located in regions covered by the contract should consider bidding. The University of Sheffield's established presence in the education sector and the specific requirements outlined make this tender suitable for companies with expertise in precision equipment manufacturing and delivery.

## Notice

The Device Fabrication Small Research Facility (SRF) currently has one reactive ion etcher (RIE) and two inductively coupled plasma reactive ion etchers (ICPRIE), serving a wide range of research and industrial customers from across the University and nationally. The SRF is capable of manufacturing Semiconductor devices via a range of standard processes, working alongside our Epitaxy facility growing advanced semiconductor materials. Our research portfolio in these areas is in excess of PS50million. The RIE and ICP equipment is fundamental to device fabrication, and we are planning to expand our capacity to meet increasing demand and to improve customer service. Quotations are required for 1 off of each RIE and ICP, in two separate lots, with the specifications detailed within the tender document. The likelihood is that only one item will be purchased, hence the title of this exercise being on an and/or basis

### Lot Information

Lot 1

Quotations are required for 1 off of each RIE and ICP, in two separate lots, with the specifications detailed within the tender document. At present the likelihood is that only one item will be purchased, hence the title of this exercise being on an and/or basis. Suppliers should include all costs associated with a 'turn key' solution, i.e., supply, delivery, installation, commissioning, process verification and training, including all import duties, etc. Where possible training for technical staff in preventative maintenance operations should be included. Suppliers should consider adding value to their quotations, e.g. through extended warranties and service contracts

Options: As described within the tender documents

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Find A Tender Service |
| Latest notice | https://www.find-tender.service.gov.uk/Notice/028404-2023 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | Large |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 26 Sep 2023 |
| Submission deadline | 4 Jan 2023 |
| Future notice date | Not specified |
| Award date | 24 Aug 2023 |
| Contract period | 1 Oct 2023 - 15 Jul 2024 |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £560,000 |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | £865,400 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Cancelled |
| Awards status | Active |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF SHEFFIELD |
| Locality | SHEFFIELD |
| Post town | Sheffield |
| Postcode | S10 2TN |
| Country | England |
| ITL 1 | TLE Yorkshire and The Humber |
| ITL 2 | TLE3 South Yorkshire |
| ITL 3 | TLE32 Sheffield |
| Local authority | Sheffield |
| Electoral ward | Broomhill and Sharrow Vale |
| Westminster constituency | Sheffield Central |
| Delivery location | TLE32 Sheffield |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 2 |
| Supplier names | OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS; OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LTD. (T/A OXFORD INSTRUMENTS PLASMA TECHNOLOGY |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)
- 42 - Industrial machinery

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)
- 42000000 - Industrial machinery

## Release History

- 26 Sep 2023 at 15:00 - AwardUpdate - Award Notice - https://www.find-tender.service.gov.uk/Notice/028404-2023
- 26 Sep 2023 at 14:11 - Award - Award Notice - https://www.find-tender.service.gov.uk/Notice/028386-2023
- 3 Jan 2023 at 13:10 - TenderUpdate - Tender Notice - https://www.find-tender.service.gov.uk/Notice/000055-2023
- 29 Nov 2022 at 15:54 - Tender - Tender Notice - https://www.find-tender.service.gov.uk/Notice/033832-2022

## Notice URLs

- https://in-tendhost.co.uk/sheffield/aspx/Home
- https://www.sheffield.ac.uk/

## Provenance

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