---
title: "904 - Compound Semiconductor Plasma Processing Equipment"
ocid: "ocds-h6vhtk-041d7c"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-h6vhtk-041d7c"
markdown_url: "https://d3tenders.com/contract/ocds-h6vhtk-041d7c.md"
json_url: "https://d3tenders.com/contract/ocds-h6vhtk-041d7c.json"
source: "Find A Tender Service"
current_stage: "Tender"
buyer: "ASTON UNIVERSITY"
published: "2023-11-28"
---

# 904 - Compound Semiconductor Plasma Processing Equipment

Buyer: ASTON UNIVERSITY  
Current stage: Tender  
OCID: ocds-h6vhtk-041d7c

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## Summary

The College of Engineering and Physical Sciences (EPS) at Aston University is seeking a supplier for Compound Semiconductor Plasma Processing Equipment. This tender falls under the goods category with a contract value of £1,200,000. The project involves creating a III-V semiconductor fabrication facility and requires tools for processing semiconductor and dielectric materials. The contract period starts on 1st November 2024 and ends on 31st October 2028. Aston University, based in Birmingham, UK, is the buyer organisation. The tender deadline is 12th January 2024, and the award period begins the same day.

This tender from Aston University provides an opportunity for businesses specializing in laboratory, optical, and precision equipment to compete for the supply of plasma processing tools. Companies experienced in semiconductor material processing and deposition of dielectric layers are well-suited to bid for this contract. The procurement method is an open procedure, requiring electronic submissions. Businesses located within the UKG31 region or willing to deliver to this area can participate in this procurement process.

## Notice

The College of Engineering and Physical Sciences (EPS) at Aston university is creating a III-V semiconductor fabrication facility. As a consequence, we are seeking a single supplier to provide a suite of plasma processing tools for: * ICP Etch of semiconductor materials (e.g. GaAs, GaN, InP, GaSb) * RIE Etch of dielectric materials (e.g. SiO2, SiNx) and metals (e.g. Au, Ge, Cr, Ti, Pt, Pd) * Deposition of dielectric layers (e.g. SiO2, SiNx) The full project specific requirements and equipment specification can be found within the project question set on Aston University's e-tendering portal ProContract under Section 11 - Project Specific Requirements.

### Lot Information

Lot 1

The College of Engineering and Physical Sciences (EPS) at Aston university is creating a III-V semiconductor fabrication facility. As a consequence, we are seeking a single supplier to provide a suite of plasma processing tools for: * ICP Etch of semiconductor materials (e.g. GaAs, GaN, InP, GaSb) * RIE Etch of dielectric materials (e.g. SiO2, SiNx) and metals (e.g. Au, Ge, Cr, Ti, Pt, Pd) * Deposition of dielectric layers (e.g. SiO2, SiNx) The full project specific requirements and equipment specification can be found within the project question set on Aston University's e-tendering portal ProContract under Section 11 - Project Specific Requirements.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Find A Tender Service |
| Latest notice | https://www.find-tender.service.gov.uk/Notice/035128-2023 |
| Notice type | Tender Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | Not specified |
| All stages | Tender |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 28 Nov 2023 |
| Submission deadline | 12 Jan 2024 |
| Future notice date | Not specified |
| Award date | Not specified |
| Contract period | 1 Nov 2024 - 31 Oct 2028 |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £1,200,000 |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | Not specified |

## Status

| Field | Value |
| --- | --- |
| Tender status | Active |
| Lots status | Active |
| Awards status | Not specified |
| Contracts status | Not specified |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | ASTON UNIVERSITY |
| Locality | BIRMINGHAM |
| Post town | Birmingham |
| Postcode | B4 7ET |
| Country | England |
| ITL 1 | TLG West Midlands (England) |
| ITL 2 | TLG3 West Midlands |
| ITL 3 | TLG31 Birmingham |
| Local authority | Birmingham |
| Electoral ward | Nechells |
| Westminster constituency | Birmingham Ladywood |
| Delivery location | TLG31 Birmingham |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 28 Nov 2023 at 20:39 - Tender - Tender Notice - https://www.find-tender.service.gov.uk/Notice/035128-2023

## Notice URLs

- http://www.aston.ac.uk
- https://procontract.due-north.com/Advert/Index?advertId=3015b2a6-2b8e-ee11-8125-005056b64545

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-h6vhtk-041d7c. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-h6vhtk-041d7c.json.
