--- title: "Photolithography Cluster" ocid: "ocds-kuma6s-116335" canonical_url: "https://d3tenders.com/contract/?ocid=ocds-kuma6s-116335" markdown_url: "https://d3tenders.com/contract/ocds-kuma6s-116335.md" json_url: "https://d3tenders.com/contract/ocds-kuma6s-116335.json" source: "Sell2Wales" current_stage: "Award" buyer: "CARDIFF UNIVERSITY" published: "2022-03-01" --- # Photolithography Cluster Buyer: CARDIFF UNIVERSITY Current stage: Award OCID: ocds-kuma6s-116335 [View canonical contract page](https://d3tenders.com/contract/?ocid=ocds-kuma6s-116335) [Download OCDS JSON](https://d3tenders.com/contract/ocds-kuma6s-116335.json) ## Summary Cardiff University is seeking suppliers for the "Photolithography Cluster" project, aimed at establishing a state-of-the-art cleanroom facility for the Institute for Compound Semiconductors within Cardiff's Translational Research Hub. The procurement type is an open tender process, currently at the award stage. This project encompasses three distinct lots: Spin, bake & prime; Developer (TMAH); and Developer (Solvent), with significant deadlines previously set for submissions and evaluations occurring in early 2022. The total contract value includes amounts of £151,780, £79,451, and £108,121 across different lots, all of which have been awarded to Inseto UK Ltd. This tender presents an excellent opportunity for businesses, particularly SMEs, specialising in semiconductor processing technologies and lithography tools. Companies that can offer innovative solutions and meet criteria for quality and pricing are encouraged to participate, especially in the sectors associated with electronics and materials science. The successful implementation of this project is likely to enhance supplier visibility within the high-tech manufacturing landscape while contributing to growth and development in related industries. ## Notice The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media. This tender is separated into 3 lots that will be referred to as: - Lot 1: Spin, bake & prime - Lot 2: Developer (TMAH) - Lot 3: Developer (Solvent) ### Lot Information Developer (Solvent) The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc). Spin, bake & prime Spin, bake and prime tool Developer (TMAH) The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc). ## Key Details | Field | Value | | --- | --- | | Publication source | Sell2Wales | | Latest notice | https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=116335 | | Notice type | OJEU - F3 - Contract Award Notice | | Procurement type | Standard | | Procurement category | Goods | | Procurement method | Open | | Procurement method details | Open procedure | | Tender suitability | Not specified | | Awardee scale | SME | | All stages | Tender, Award | ## Dates | Field | Value | | --- | --- | | Publication date | 1 Mar 2022 | | Submission deadline | 14 Jan 2022 | | Future notice date | Not specified | | Award date | 1 Mar 2022 | | Contract period | Not specified | | Recurrence | Not specified | ## Values | Field | Value | | --- | --- | | Tender value | Not specified | | Lots value | Not specified | | Awards value | Not specified | | Contracts value | £339,352 | ## Status | Field | Value | | --- | --- | | Tender status | Complete | | Lots status | Complete | | Awards status | Not specified | | Contracts status | Active | ## Buyer | Field | Value | | --- | --- | | Main buyer | CARDIFF UNIVERSITY | | Locality | CARDIFF | | Post town | Cardiff | | Postcode | CF24 0DE | | Country | Wales | | ITL 1 | TLL Wales | | ITL 2 | TLL5 South East Wales | | ITL 3 | TLL52 Cardiff and Vale of Glamorgan | | Local authority | Cardiff | | Electoral ward | Adamsdown | | Westminster constituency | Cardiff East | | Delivery location | TLL22 Cardiff and Vale of Glamorgan | ## Supplier | Field | Value | | --- | --- | | Number of suppliers | 1 | | Supplier names | INSETO | ## CPV Codes ### Divisions - 38 - Laboratory, optical and precision equipments (excl. glasses) ### Codes - 38000000 - Laboratory, optical and precision equipments (excl. glasses) ## Release History - 1 Mar 2022 at 00:00 - Award - OJEU - F3 - Contract Award Notice - https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=116335 - 30 Nov 2021 at 00:00 - Tender - OJEU - F2 - Contract Notice - https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=116335 ## Documents - https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=DEC381198 Photolithography Cluster - The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media. This tender is separated into 3 lots that will be referred to as: - Lot 1: Spin, bake & prime - Lot 2: Developer (TMAH) - Lot 3: Developer (Solvent) - https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=MAR390518 Photolithography Cluster - The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media. This tender is separated into 3 lots that will be referred to as: - Lot 1: Spin, bake & prime - Lot 2: Developer (TMAH) - Lot 3: Developer (Solvent) ## Notice URLs - http://www.cardiff.ac.uk/business/why-work-with-us/for-suppliers - https://api.sell2wales.gov.wales/v1?lang=cy/Notice?id=ocds-kuma6s-116335 - https://in-tendhost.co.uk/cardiffuniversity/aspx/Home ## Provenance This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-kuma6s-116335. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-kuma6s-116335.json.