---
title: "PECVD Plasma Deposition Tool"
ocid: "ocds-kuma6s-116928"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-kuma6s-116928"
markdown_url: "https://d3tenders.com/contract/ocds-kuma6s-116928.md"
json_url: "https://d3tenders.com/contract/ocds-kuma6s-116928.json"
source: "Sell2Wales"
current_stage: "Award"
buyer: "CARDIFF UNIVERSITY"
published: "2022-03-29"
---

# PECVD Plasma Deposition Tool

Buyer: CARDIFF UNIVERSITY  
Current stage: Award  
OCID: ocds-kuma6s-116928

[View canonical contract page](https://d3tenders.com/contract/?ocid=ocds-kuma6s-116928)  
[Download OCDS JSON](https://d3tenders.com/contract/ocds-kuma6s-116928.json)

## Summary

Cardiff University is seeking a suitably qualified supplier for the procurement of a PECVD Plasma Deposition Tool, designated for use within an ICS cleanroom to deposit dielectric films on semiconductor samples and wafers. The procurement process is currently at the award stage, with the contract awarded to Oxford Instruments for a summed amount of £259,975. Key procurement details include the submission deadline on 7 February 2022, with further specifications related to the tool provided on the Cardiff University procurement website. The procurement method utilised was an open procedure, categorised under goods, aligning with the education sector's needs.

This tender presents significant opportunities for businesses specialising in semiconductor manufacturing and related technologies. Suppliers with expertise in cleanroom equipment and experience in delivering high-quality goods in the education and research sectors would be well-positioned to compete. Additionally, small to medium-sized enterprises (SMEs) may find this an advantageous opportunity to forge partnerships and expand their footprint within the higher education procurement landscape.

## Notice

A new PECVD plasma deposition tool for use within the ICS cleanroom to deposit films of dielectric materials onto semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers.

### Lot Information

Lot 1

The requirement of the tool is to deposit films of dielectric materials onto semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Sell2Wales |
| Latest notice | https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=116928 |
| Notice type | OJEU - F3 - Contract Award Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | SME |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 29 Mar 2022 |
| Submission deadline | 7 Feb 2022 |
| Future notice date | Not specified |
| Award date | 29 Mar 2022 |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | Not specified |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | £259,975 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Complete |
| Awards status | Not specified |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | CARDIFF UNIVERSITY |
| Locality | CARDIFF |
| Post town | Cardiff |
| Postcode | CF24 0DE |
| Country | Wales |
| ITL 1 | TLL Wales |
| ITL 2 | TLL5 South East Wales |
| ITL 3 | TLL52 Cardiff and Vale of Glamorgan |
| Local authority | Cardiff |
| Electoral ward | Adamsdown |
| Westminster constituency | Cardiff East |
| Delivery location | TLL22 Cardiff and Vale of Glamorgan |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | OXFORD INSTRUMENTS |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 29 Mar 2022 at 00:00 - Award - OJEU - F3 - Contract Award Notice - https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=116928
- 17 Dec 2021 at 00:00 - Tender - OJEU - F2 - Contract Notice - https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=116928

## Documents

- https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=DEC382801
  PECVD Plasma Deposition Tool - A new PECVD plasma deposition tool for use within the ICS cleanroom to deposit films of dielectric materials onto semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers.
- https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=MAR393617
  PECVD Plasma Deposition Tool - A new PECVD plasma deposition tool for use within the ICS cleanroom to deposit films of dielectric materials onto semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers.

## Notice URLs

- http://www.cardiff.ac.uk/business/why-work-with-us/for-suppliers
- https://api.sell2wales.gov.wales/v1?lang=cy/Notice?id=ocds-kuma6s-116928
- https://in-tendhost.co.uk/cardiffuniversity/aspx/Home

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-kuma6s-116928. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-kuma6s-116928.json.