---
title: "Deposition Tools"
ocid: "ocds-kuma6s-117762"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-kuma6s-117762"
markdown_url: "https://d3tenders.com/contract/ocds-kuma6s-117762.md"
json_url: "https://d3tenders.com/contract/ocds-kuma6s-117762.json"
source: "Sell2Wales"
current_stage: "Award"
buyer: "CARDIFF UNIVERSITY"
published: "2022-03-24"
---

# Deposition Tools

Buyer: CARDIFF UNIVERSITY  
Current stage: Award  
OCID: ocds-kuma6s-117762

[View canonical contract page](https://d3tenders.com/contract/?ocid=ocds-kuma6s-117762)  
[Download OCDS JSON](https://d3tenders.com/contract/ocds-kuma6s-117762.json)

## Summary

Cardiff University is seeking suppliers for "Deposition Tools" through a recent tender process, categorised under the goods procurement sector within the education industry. The tender process is currently at the award stage, having been completed on 24 March 2022. A contract has been awarded to SPTS Technologies Ltd, with a total contract value of £1,666,666. The tender involved the provision of plasma etch systems capable of processing specific semiconductor materials, with requirements outlined in detail. 

This procurement presents significant opportunities for businesses involved in semiconductor manufacturing and equipment supply, particularly those specialising in plasma etching technologies and related services. Companies offering advanced manufacturing equipment or consultancy in semiconductor applications would be particularly well-suited to compete for such tenders, leveraging their expertise to fulfil the technical specifications required by Cardiff University.

## Notice

- An ICP Plasma Etch system, with load lock, for etching III-V materials to shallow or standard (100um), Glass, SiNx,, SiC, GaN, PZT and AlN and Al2O3. Must operate with higher plasma density and at lower pressures than conventional ICP systems.

### Lot Information

Lot 1

The requirement of the Plasma ETCH tools is to etch III-V semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers. The requirement of the PECVD tool is to deposit films of dielectric materials onto semiconductor samples, wafers and other substrates, ranging in size from 10 x 10 mm up to 200mm diameter wafers. The supplier must provide all 3 systems, to criteria set out below, for the bid to be successful. Specification of Equipment An ICP Plasma Etch system, with load lock, for etching III-V materials to shallow or standard (100um), Glass, SiNx,, SiC, GaN, PZT and AlN and Al2O3. Must operate with higher plasma density and at lower pressures than conventional ICP systems.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Sell2Wales |
| Latest notice | https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=117762 |
| Notice type | OJEU - F3 - Contract Award Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | Large |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 24 Mar 2022 |
| Submission deadline | 18 Feb 2022 |
| Future notice date | Not specified |
| Award date | 24 Mar 2022 |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £2,000,000 |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | £1,666,666 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Complete |
| Awards status | Not specified |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | CARDIFF UNIVERSITY |
| Locality | CARDIFF |
| Post town | Cardiff |
| Postcode | CF24 0DE |
| Country | Wales |
| ITL 1 | TLL Wales |
| ITL 2 | TLL5 South East Wales |
| ITL 3 | TLL52 Cardiff and Vale of Glamorgan |
| Local authority | Cardiff |
| Electoral ward | Adamsdown |
| Westminster constituency | Cardiff East |
| Delivery location | TLL22 Cardiff and Vale of Glamorgan |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | SPTS TECHNOLOGIES |

## CPV Codes

### Divisions

- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 24 Mar 2022 at 00:00 - Award - OJEU - F3 - Contract Award Notice - https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=117762
- 19 Jan 2022 at 00:00 - Tender - OJEU - F2 - Contract Notice - https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=117762

## Documents

- https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=JAN386144
  Deposition Tools - - An ICP Plasma Etch system, with load lock, for etching III-V materials to shallow or standard (100um), Glass, SiNx,, SiC, GaN, PZT and AlN and Al2O3. Must operate with higher plasma density and at lower pressures than conventional ICP systems.
- https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=MAR393157
  Deposition Tools - - An ICP Plasma Etch system, with load lock, for etching III-V materials to shallow or standard (100um), Glass, SiNx,, SiC, GaN, PZT and AlN and Al2O3. Must operate with higher plasma density and at lower pressures than conventional ICP systems.

## Notice URLs

- http://www.cardiff.ac.uk/business/why-work-with-us/for-suppliers
- https://api.sell2wales.gov.wales/v1?lang=cy/Notice?id=ocds-kuma6s-117762
- https://in-tendhost.co.uk/cardiffuniversity/aspx/Home

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-kuma6s-117762. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-kuma6s-117762.json.