---
title: "School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System"
ocid: "ocds-r6ebe6-0000641621"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-r6ebe6-0000641621"
markdown_url: "https://d3tenders.com/contract/ocds-r6ebe6-0000641621.md"
json_url: "https://d3tenders.com/contract/ocds-r6ebe6-0000641621.json"
source: "Public Contracts Scotland"
current_stage: "Award"
buyer: "UNIVERSITY OF ST ANDREWS"
published: "2021-06-01"
---

# School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System

Buyer: UNIVERSITY OF ST ANDREWS  
Current stage: Award  
OCID: ocds-r6ebe6-0000641621

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## Summary

The University of St Andrews is procuring an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system to enhance its physics and astronomy research and teaching activities. This procurement is classified under the goods category and is currently in the Award stage, having been awarded on 25 May 2021. The submission for bids had ended on 24 February 2021. The chosen supplier for this contract is SENTECH Instruments GmbH, with a contract value of £273,125. Delivery is expected at the University’s location in St Andrews, UK.

This tender presents significant opportunities for growth, especially for SMEs in the scientific and technical equipment sector. Businesses that manufacture or supply advanced equipment for university research, particularly those specialising in etching systems and related components, would be well-suited to participate in similar future tenders. Engaging with the procurement process requires an understanding of the specific technical requirements and the experience of supplying educational institutions. Interested parties are encouraged to register and express their interest through the University’s electronic tendering system.

## Notice

The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.

### Lot Information

Lot 1

We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for high quality etching (high etch rates, side wall angle control and low sidewall roughness) of - silicon, - silicon compounds (e.g. SiC, Si3N4), - compound III-V & compound II-VI semiconductors (e.g. AlGaInP, InGaP, AlGaAs, InP, GaAs, GaN, etc.), - dielectrics (e.g. ZnO2, TiO, ITO, Al2O3, ZrO2, etc.), - metals (e.g. Cr, Al, Ti, Au, W, Pt, etc.) and - organics (e.g. resists like SU8, S1818, etc and polymers like parylene, PS etc) containing an inductively coupled plasma (ICP) source for the generation of plasmas with high ion density, low ion energy and narrow energy distribution (ion energy and ion density are separately controllable via an included bias generator). The ICP-RIE etcher should be fully clean room-compatible. Wafers should be loaded into the etching chamber via a vacuum load lock for process stability, short process cycle times and safety issues. The substrate electrode should be He back-side cooled for dynamic, direct and very efficient temperature control of the substrate in a range of -20 degC to 150 degC, which may require the attachment of an external chiller (to be included in quotation). The etcher should be equipped with a laser interferometer to allow for live detection of the etching progress, and optionally also with an optical emission spectrometer for monitoring of chamber condition. The etcher should be compatible with fluorinated and chlorinated gases. The entire system should be operated from a PC (to be included in delivery).. All Tenders for the University of St Andrews are administered through our e-Tendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Public Contracts Scotland |
| Latest notice | https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN416898 |
| Notice type | OJEU - F3 - Contract Award Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | SME |
| All stages | Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 1 Jun 2021 |
| Submission deadline | 24 Feb 2021 |
| Future notice date | Not specified |
| Award date | 25 May 2021 |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | Not specified |
| Lots value | Not specified |
| Awards value | Not specified |
| Contracts value | £273,125 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Complete |
| Awards status | Not specified |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF ST ANDREWS |
| Locality | GUARDBRIDGE |
| Post town | Kirkcaldy |
| Postcode | KY16 0US |
| Country | Scotland |
| ITL 1 | TLM Scotland |
| ITL 2 | TLM0 Eastern Scotland |
| ITL 3 | TLM01 Clackmannanshire and Fife |
| Local authority | Fife |
| Electoral ward | St Andrews |
| Westminster constituency | North East Fife |
| Delivery location | TLM72 Clackmannanshire and Fife |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | SENTECH INSTRUMENTS |

## CPV Codes

### Divisions

- 22 - Printed matter and related products
- 42 - Industrial machinery

### Codes

- 22520000 - Dry-etching equipment
- 42122450 - Vacuum pumps
- 42124300 - Parts of air or vacuum pumps, of air or gas compressors

## Release History

- 1 Jun 2021 at 00:00 - Award - OJEU - F3 - Contract Award Notice - https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN416898
- 22 Jan 2021 at 00:00 - Tender - OJEU - F2 - Contract Notice - https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JAN404840

## Documents

- https://www.publiccontractsscotland.gov.uk/NoticeDownload/DownloadDocument.aspx?id=JAN404840&idx=1
  22nd January 2021 - Portal Supplier Registration
- https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JAN404840
  School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System - The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.
- https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN416898
  School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System - The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.

## Notice URLs

- http://
- http://www.st-andrews.ac.uk/procurement/
- https://api.publiccontractsscotland.gov.uk/v1/Notice?id=ocds-r6ebe6-0000641621
- https://in-tendhost.co.uk/universityofstandrews
- https://intendhost.co.uk/universityofstandrews

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-r6ebe6-0000641621. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-r6ebe6-0000641621.json.