---
title: "Supply and Commissioning of an Inductively Coupled Plasma Etcher"
ocid: "ocds-r6ebe6-0000792877"
canonical_url: "https://d3tenders.com/contract/?ocid=ocds-r6ebe6-0000792877"
markdown_url: "https://d3tenders.com/contract/ocds-r6ebe6-0000792877.md"
json_url: "https://d3tenders.com/contract/ocds-r6ebe6-0000792877.json"
source: "Public Contracts Scotland"
current_stage: "Award"
buyer: "UNIVERSITY OF STRATHCLYDE"
published: "2026-01-08"
---

# Supply and Commissioning of an Inductively Coupled Plasma Etcher

Buyer: UNIVERSITY OF STRATHCLYDE  
Current stage: Award  
OCID: ocds-r6ebe6-0000792877

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## Summary

The University of Strathclyde has initiated an open tender process for the supply and commissioning of an Inductively Coupled Plasma Etcher, intended for use in the Institute of Photonics. This procurement, valued at £425,827, is categorized under research and development equipment within the education industry, and is aimed at advancing scientific investigation in neuro-technology. The equipment is to be installed in the Technology and Innovation Centre's cleanroom facility in Glasgow, with submissions required electronically via the Public Contracts Scotland platform. Key dates include the submission deadline and the start of the award period on 14th July 2025. The process follows an open procedure and is subject to the Agreement on Government Procurement (GPA), ensuring compliance with international standards.

This tender presents significant opportunities for businesses specializing in semiconductor processing equipment and laboratory installations. Companies with expertise in producing or supplying plasma etching systems, particularly those capable of meeting the specific technical requirements such as Inductively Coupled Plasma Reactive Ion Etching and Deep Silicon Etching, are well-suited to compete. The demand for high-quality, low-maintenance equipment presents a lucrative opportunity for suppliers with proven track records of innovation and reliability in the sector. In addition, this contract offers a chance for businesses to establish or expand their presence in the academic research and development market, enhancing their profiles in the public procurement landscape.

## Notice

This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom. The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.

### Lot Information

Lot 1

The Institute of Photonics is seeking to complement their cleanroom micro-fabrication facility equipment with an Inductively Coupled Plasma Etcher system The Technical Team envision that the equipment will process semiconductor materials that will include but not be limited to: 1 Gallium Nitride (GaN) light-emitting diodes 2 Silicon (Si) passive and active devices The equipment will be used to advance scientific investigation in neuro-technology and operated by PhD students, Postdoctoral Research Associates and Technicians within the Institute of Photonics. The Contracting Authority anticipates that the contract will be for a duration of twenty (24) months. The Contracting Authority requires a supplier that can fulfil the below non-exhaustive list of requirements: 1 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) mode of operation to plasma etch hard materials such as GaN at etch rate of >500nm/min 2 Deep Silicon Etching (DSE) mode of operation to plasma etch high aspect ratio and high-density structures in Silicon at etch rate of >1000nm/min 3 These two modes of operation co-existing within the same equipment within a minimal footprint 4 Low-maintenance, especially with the provision of servicing-free high vacuum pumping systems (magnetic-levitated turbo molecular pump) Please refer to the full technical and tender information available in the Public Contracts Scotland-Tender.

Options: The Contracting Authority reserves the right to request additional deliveries by the successful Tenderer, either intended as partial replacement of supplies or installations or as extensions of existing supplies and installations. The Contracting Authority may at it's sole discretion exercise this option.

## Key Details

| Field | Value |
| --- | --- |
| Publication source | Public Contracts Scotland |
| Latest notice | https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JAN546727 |
| Notice type | OJEU - F3 - Contract Award Notice |
| Procurement type | Standard |
| Procurement category | Goods |
| Procurement method | Open |
| Procurement method details | Open procedure |
| Tender suitability | Not specified |
| Awardee scale | SME |
| All stages | Planning, Tender, Award |

## Dates

| Field | Value |
| --- | --- |
| Publication date | 8 Jan 2026 |
| Submission deadline | 14 Jul 2025 |
| Future notice date | 12 Mar 2025 |
| Award date | 16 Dec 2025 |
| Contract period | Not specified |
| Recurrence | Not specified |

## Values

| Field | Value |
| --- | --- |
| Tender value | £425,827 |
| Lots value | £425,827 |
| Awards value | Not specified |
| Contracts value | £375,883 |

## Status

| Field | Value |
| --- | --- |
| Tender status | Complete |
| Lots status | Complete |
| Awards status | Not specified |
| Contracts status | Active |

## Buyer

| Field | Value |
| --- | --- |
| Main buyer | UNIVERSITY OF STRATHCLYDE |
| Locality | GLASGOW |
| Post town | Glasgow |
| Postcode | G1 1XU |
| Country | Scotland |
| ITL 1 | TLM Scotland |
| ITL 2 | TLM3 West Central Scotland |
| ITL 3 | TLM32 Glasgow City |
| Local authority | Glasgow City |
| Electoral ward | Anderston/City/Yorkhill |
| Westminster constituency | Glasgow North East |
| Delivery location | TLM82 Glasgow City |

## Supplier

| Field | Value |
| --- | --- |
| Number of suppliers | 1 |
| Supplier names | SENTECH INSTRUMENTS |

## CPV Codes

### Divisions

- 31 - Electrical machinery, apparatus, equipment and consumables; lighting
- 38 - Laboratory, optical and precision equipments (excl. glasses)

### Codes

- 31712100 - Microelectronic machinery and apparatus
- 38000000 - Laboratory, optical and precision equipments (excl. glasses)

## Release History

- 8 Jan 2026 at 00:00 - Award - OJEU - F3 - Contract Award Notice - https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JAN546727
- 11 Jun 2025 at 00:00 - Tender - OJEU - F2 - Contract Notice - https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN532366
- 11 Mar 2025 at 00:00 - Planning - OJEU - F1 - Prior Information Notice - https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=MAR525704

## Documents

- https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=MAR525704
  Supply and Commissioning of an Inductively Coupled Plasma Etcher - An Inductively Coupled Plasma Etcher is sought to process semiconductor materials such as (but not limited to) Gallium Nitride and Silicon. The ideal system will be deployed for academic research and located within a cleanroom micro-fabrication facility.
- https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN532366
  Supply and Commissioning of an Inductively Coupled Plasma Etcher - This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom. The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.
- https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JAN546727
  Supply and Commissioning of an Inductively Coupled Plasma Etcher - This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom. The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.

## Notice URLs

- http://
- http://www.strath.ac.uk/
- https://api.publiccontractsscotland.gov.uk/v1/Notice?id=ocds-r6ebe6-0000792877
- https://www.publictendersscotland.publiccontractsscotland.gov.uk/esop/pts-host/public/pts/web/login.html

## Provenance

This Markdown file is an alternate public rendering of the D3 Tenders contract record. The canonical page is https://d3tenders.com/contract/?ocid=ocds-r6ebe6-0000792877. The underlying structured data is available as OCDS JSON at https://d3tenders.com/contract/ocds-r6ebe6-0000792877.json.