Notice Information
Notice Title
Atomic Layer Etching for 2DM studies - AWARD
Notice Description
Background information on Project This tender is being run on behalf of Prof. Roman Gorbachev for the School of Physics and Astronomy/National Graphene Institute. Project Overview The National Graphene Institute (NGI) has a large cleanroom facility housing a range of state-of-the-art instruments dedicated to the fabrication and characterization of 2D related metamaterials and devices for a broad range of applications, from advanced optoelectronics to nanofluidics. An essential part of many fabrication processes is the capability to dry etch materials. A range of plasma-based dry etching techniques have been developed for 2D materials (2DM), primarily to completely remove specific regions in order to create a pattern defined by a lithographic mask. "Thinning down" of atomically thin 2DM by etching so far remains problematic, as the surface amorphization leads to complete loss of their unique properties. Subsequently, "soft-plasma" etching techniques were developed to approach layer-by-layer etching of various 2DM. These methods provide great control of the thickness, but they are not self-limiting in nature due to associated physical etching processes and thus require careful optimization of many dry etching parameters. Even then, damage to the underlaying materials is frequent, limiting its use for nanotechnology applications that demand the highest crystal quality (quantum technologies, sensors, etc.). To overcome these limitations, this project aims to study the use of Atomic Layer Etching (ALE) of 2DM, using multi-step, self-limiting reactions to allow precise (layer-by-layer), highly selective and low damage etching. The proposed platform must include the capability to perform ALE in addition to the conventional inductively coupled plasma (ICP) and/or reactive ion etching (RIE) processes, with fast recipe control and fine tuning of low bias powers. Apart from "thinning down" of 2DM, more controllable and reliable ICP/RIE will also benefit a range of already existing processes in terms of reproducibility, uniformity and control, such as clean layer transfers for heterostructure fabrication and synthesis of high-quality ohmic contacts to 2DM.
Notice Details
Publication & Lifecycle
- Open Contracting ID
- ocds-b5fd17-75837845-e2ba-4b10-b3e9-9278d3f376c3
- Publication Source
- Contracts Finder
- Latest Notice
- https://www.contractsfinder.service.gov.uk/Notice/065154db-e623-4ebc-9714-a3ecd9ea6b5c
- Current Stage
- Award
- All Stages
- Award
Procurement Classification
- Notice Type
- Award Notice
- Procurement Type
- Standard
- Procurement Category
- Goods
- Procurement Method
- Open
- Procurement Method Details
- Open procedure
- Tender Suitability
- SME
- Awardee Scale
- Not specified
Common Procurement Vocabulary (CPV)
- CPV Divisions
22 - Printed matter and related products
38 - Laboratory, optical and precision equipments (excl. glasses)
-
- CPV Codes
22520000 - Dry-etching equipment
38000000 - Laboratory, optical and precision equipments (excl. glasses)
Notice Value(s)
- Tender Value
- Not specified
- Lots Value
- Not specified
- Awards Value
- Not specified
- Contracts Value
- Not specified
Notice Dates
- Publication Date
- 8 Oct 20241 years ago
- Submission Deadline
- 7 May 2024Expired
- Future Notice Date
- Not specified
- Award Date
- 7 Oct 20241 years ago
- Contract Period
- 16 May 2024 - 6 May 2025 6-12 months
- Recurrence
- Not specified
Notice Status
- Tender Status
- Complete
- Lots Status
- Not Specified
- Awards Status
- Active
- Contracts Status
- Not Specified
Buyer & Supplier
Contracting Authority (Buyer)
- Main Buyer
- THE UNIVERSITY OF MANCHESTER
- Contact Name
- Paul Carter
- Contact Email
- paul.carter-2@manchester.ac.uk
- Contact Phone
- -
Buyer Location
- Locality
- MANCHESTER
- Postcode
- M13 9PL
- Post Town
- Manchester
- Country
- England
-
- Major Region (ITL 1)
- TLD North West (England)
- Basic Region (ITL 2)
- TLD3 Greater Manchester
- Small Region (ITL 3)
- TLD33 Manchester
- Delivery Location
- TLD North West (England)
-
- Local Authority
- Manchester
- Electoral Ward
- Hulme
- Westminster Constituency
- Manchester Rusholme
Further Information
Notice Documents
-
https://www.contractsfinder.service.gov.uk/Notice/065154db-e623-4ebc-9714-a3ecd9ea6b5c
8th October 2024 - Awarded contract notice on Contracts Finder
Open Contracting Data Standard (OCDS)
View full OCDS Record for this contracting process
The Open Contracting Data Standard (OCDS) is a framework designed to increase transparency and access to public procurement data in the public sector. It is widely used by governments and organisations worldwide to report on procurement processes and contracts.
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