Award

200mm Capable High Resolution Imaging Equipment

UNIVERSITY OF SOUTHAMPTON

  • Contract Timeline

    Publication Date

    27th November 2024 13:23:57 PM

  • Contract Summary

    The University of Southampton Zepler Cleanrooms were looking to purchase in a 200mm wafer capable, ultra-high resolution scanning electron microscope (UHR-SEM). The equipment will deliver efficient fabrication at the wafer scale, process waste reduction and sustainable resource management via enabling of routine imaging and materials analysis, whilst remaining accessible in terms of ease of operation and training for a diverse user base at the academic research level. The proposed equipment is a state-of-the art sub-nanometre, ultra-high resolution scanning electron microscope for fast imaging time to results, shortening the inspection loop in wafer-scale device fabrication, and maintaining the quality of material platforms and lithographic tolerances. By acquiring this equipment, the Zepler Cleanrooms intend: • To be a centre for wafer-scale analysis of material, device performance, and fabrication quality management • To be an integral part of the UK semiconductor fabrication ecosystem that supports 200mm wafer-scale processing. • To provide national semiconductor research and development capability of high- throughput inspection and process yield evaluation for up to 200mm wafers.

  • Contract Details

    Open Contracting ID

    ocds-b5fd17-dd0888a9-354c-45b4-abd8-0bff028836cd

    Publication Source

    Contracts Finder

    Procurement Stage

    Award

    Procurement Method

    Selective

    Procurement Method Details

    Call-off From A Framework Agreement

    Procurement Category

    Goods

    Tender Suitability

    SME

    Framework / DPS

    Framework

  • Contract Classification

    CPV Code(s)

    38000000

    CPV Division(s)

    38 - Laboratory, optical and precision equipments (excl. glasses)

  • Awarding Authority

    UNIVERSITY OF SOUTHAMPTON

    Buyer Name

    Amy Hands

    Buyer Email

    procurement@soton.ac.uk

    Buyer Phone

    02380595000

    Buyer Address

    UNIVERSITY ROAD

    SOUTHAMPTON

    SO171BJ

    England

  • Awarded Supplier(s)

    Supplier Name(s)

    FEI UK LTD