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School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System

University of St Andrews

This public procurement record has 2 releases in its history.

Award

01 Jun 2021 at 12:04

Award Notice
Tender

22 Jan 2021 at 15:16

Tender Notice
Summary of the contracting process

The University of St Andrews is currently in the tender stage of procurement for an Inductively Coupled Plasma Reactive-Ion Etching system, classified under the goods category, specifically for dry-etching equipment. This procurement is taking place in St Andrews, UK, and the deadline for bid submissions was on 24th February 2021. The tender process follows an open procurement method, and the successful bidder will be awarded the contract based on specific criteria, focusing on quality (65%) and cost (35%).

This tender presents a significant opportunity for businesses specialising in high-tech manufacturing and scientific equipment, particularly those with expertise in vacuum technology and cleanroom-compatible machinery. Suppliers capable of providing advanced etching systems, along with relevant accessories such as vacuum pumps, would be well-positioned to compete. Given the open nature of the tender and the emphasis on quality, innovative SMEs, as well as larger firms with proven track records in similar industries, are encouraged to engage with this opportunity to facilitate their growth within the academic and research sectors.

How relevant is this notice?

Notice Information

Notice Title

School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System

Notice Description

The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.

Lot Information

Lot 1

We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for high quality etching (high etch rates, side wall angle control and low sidewall roughness) of - silicon, - silicon compounds (e.g. SiC, Si3N4), - compound III-V & compound II-VI semiconductors (e.g. AlGaInP, InGaP, AlGaAs, InP, GaAs, GaN, etc.), - dielectrics (e.g. ZnO2, TiO, ITO, Al2O3, ZrO2, etc.), - metals (e.g. Cr, Al, Ti, Au, W, Pt, etc.) and - organics (e.g. resists like SU8, S1818, etc and polymers like parylene, PS etc) containing an inductively coupled plasma (ICP) source for the generation of plasmas with high ion density, low ion energy and narrow energy distribution (ion energy and ion density are separately controllable via an included bias generator). The ICP-RIE etcher should be fully clean room-compatible. Wafers should be loaded into the etching chamber via a vacuum load lock for process stability, short process cycle times and safety issues. The substrate electrode should be He back-side cooled for dynamic, direct and very efficient temperature control of the substrate in a range of -20 degC to 150 degC, which may require the attachment of an external chiller (to be included in quotation). The etcher should be equipped with a laser interferometer to allow for live detection of the etching progress, and optionally also with an optical emission spectrometer for monitoring of chamber condition. The etcher should be compatible with fluorinated and chlorinated gases. The entire system should be operated from a PC (to be included in delivery). Additional information: All Tenders for the University of St Andrews are administered through our e-Tendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.

Notice Details

Publication & Lifecycle

Open Contracting ID
ocds-h6vhtk-028ca4
Publication Source
Find A Tender Service
Latest Notice
https://www.find-tender.service.gov.uk/Notice/012163-2021
Current Stage
Award
All Stages
Tender, Award

Procurement Classification

Notice Type
Tender Notice
Procurement Type
Standard
Procurement Category
Goods
Procurement Method
Open
Procurement Method Details
Open procedure
Tender Suitability
Not specified
Awardee Scale
SME

Common Procurement Vocabulary (CPV)

CPV Divisions

22 - Printed matter and related products

42 - Industrial machinery

CPV Codes

22520000 - Dry-etching equipment

42122450 - Vacuum pumps

42124300 - Parts of air or vacuum pumps, of air or gas compressors

Notice Value(s)

Tender Value
Not specified
Lots Value
Not specified
Awards Value
Not specified
Contracts Value
£273,125 £100K-£500K

Notice Dates

Publication Date
1 Jun 20215 years ago
Submission Deadline
24 Feb 2021Expired
Future Notice Date
Not specified
Award Date
25 May 20215 years ago
Contract Period
Not specified - Not specified
Recurrence
Not specified

Notice Status

Tender Status
Complete
Lots Status
Cancelled
Awards Status
Active
Contracts Status
Active

Buyer & Supplier

Contracting Authority (Buyer)

Main Buyer
University of St Andrews
Contact Name
Available with D3 Tenders Premium →
Contact Email
Available with D3 Tenders Premium →
Contact Phone
Available with D3 Tenders Premium →

Buyer Location

Locality
GUARDBRIDGE
Postcode
KY16 0US
Postcode Area
Kirkcaldy
Country
Scotland
Major Region (ITL 1)
TLM Scotland
Basic Region (ITL 2)
TLM0 Eastern Scotland
Small Region (ITL 3)
TLM01 Clackmannanshire and Fife
Delivery Location
TLM72 Clackmannanshire and Fife
Local Authority
Fife
Electoral Ward
Tay Bridgehead
Westminster Constituency
North East Fife

Supplier Information

Number of Suppliers
1
Supplier Name

SENTECH Instruments GmbH

Further Information

Open Contracting Data Standard (OCDS)

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The Open Contracting Data Standard (OCDS) is a framework designed to increase transparency and access to public procurement data in the public sector. It is widely used by governments and organisations worldwide to report on procurement processes and contracts.

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