Notice Information
Notice Title
QUB/2306/22 Supply, Delivery, Installation and Commissioning of a Physical Vapour Deposition (PVD) Thin Film Deposition Cluster - Request for Information
Notice Description
Queen's University Belfast ("Queen's") seeks to engage with providers of Thin Film Deposition Cluster Tools for the UKRI Smart Nano NI Project activity being delivered by Queen's. At present we have a technical requirement for an instrument that includes;- 1. A wafer handling system/robot (150mm or 200mm) and load-lock that can provide to a multiple of process chambers (options for single wafer or cassette loading).- 2. A Physical Vapour Deposition (PVD) process module 1 - with up to eight (8) sources capable of coverage of 150 mm wafer with high uniformity.- 3. A PVD process module 2 - with up to six (6) sources capable of coverage of 150 mm wafer with high uniformity.- 4. An Atomic layer Deposition (ALD) module for oxide deposition capable of coverage of 150 mm wafers with high uniformity. - 5. A glove-box / transfer-module for the removal/packaging, under controlled conditions, for 150mm wafers.
Notice Details
Publication & Lifecycle
- Open Contracting ID
- ocds-h6vhtk-036293
- Publication Source
- Find A Tender Service
- Latest Notice
- https://www.find-tender.service.gov.uk/Notice/023653-2022
- Current Stage
- Planning
- All Stages
- Planning
Procurement Classification
- Notice Type
- Planning Notice
- Procurement Type
- Standard
- Procurement Category
- Goods
- Procurement Method
- Not Specified
- Procurement Method Details
- Not specified
- Tender Suitability
- Not specified
- Awardee Scale
- Not specified
Common Procurement Vocabulary (CPV)
- CPV Divisions
38 - Laboratory, optical and precision equipments (excl. glasses)
-
- CPV Codes
38000000 - Laboratory, optical and precision equipments (excl. glasses)
Notice Value(s)
- Tender Value
- Not specified
- Lots Value
- Not specified
- Awards Value
- Not specified
- Contracts Value
- Not specified
Notice Dates
- Publication Date
- 24 Aug 20223 years ago
- Submission Deadline
- Not specified
- Future Notice Date
- 31 Oct 2022Expired
- Award Date
- Not specified
- Contract Period
- Not specified - Not specified
- Recurrence
- Not specified
Notice Status
- Tender Status
- Planned
- Lots Status
- Planned
- Awards Status
- Not Specified
- Contracts Status
- Not Specified
Buyer & Supplier
Contracting Authority (Buyer)
- Main Buyer
- QUEEN'S UNIVERSITY BELFAST
- Contact Name
- Emmett McCann
- Contact Email
- e.mccann@qub.ac.uk
- Contact Phone
- Not specified
Buyer Location
- Locality
- BELFAST
- Postcode
- BT7 1NN
- Post Town
- Northern Ireland
- Country
- Northern Ireland
-
- Major Region (ITL 1)
- TLN Northern Ireland
- Basic Region (ITL 2)
- TLN0 Northern Ireland
- Small Region (ITL 3)
- TLN06 Belfast
- Delivery Location
- TLN06 Belfast
-
- Local Authority
- Belfast
- Electoral Ward
- Central
- Westminster Constituency
- Belfast South and Mid Down
Further Information
Open Contracting Data Standard (OCDS)
View full OCDS Record for this contracting process
The Open Contracting Data Standard (OCDS) is a framework designed to increase transparency and access to public procurement data in the public sector. It is widely used by governments and organisations worldwide to report on procurement processes and contracts.
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