Notice Information
Notice Title
Photolithography Cluster
Notice Description
The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media. This tender is separated into 3 lots that will be referred to as: - Lot 1: Spin, bake & prime - Lot 2: Developer (TMAH) - Lot 3: Developer (Solvent)
Lot Information
Developer (Solvent)
The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc).
Spin, bake & primeSpin, bake and prime tool
Developer (TMAH)The proposed tool must be a spray/puddle development system that is compatible with conventional TMAH based resist developers (such as AZ726 and MF319 etc).
Notice Details
Publication & Lifecycle
- Open Contracting ID
- ocds-kuma6s-116335
- Publication Source
- Sell2Wales
- Latest Notice
- https://www.sell2wales.gov.wales/search/search_switch.aspx?ID=116335
- Current Stage
- Award
- All Stages
- Tender, Award
Procurement Classification
- Notice Type
- OJEU - F3 - Contract Award Notice
- Procurement Type
- Standard
- Procurement Category
- Goods
- Procurement Method
- Open
- Procurement Method Details
- Open procedure
- Tender Suitability
- Not specified
- Awardee Scale
- SME
Common Procurement Vocabulary (CPV)
- CPV Divisions
38 - Laboratory, optical and precision equipments (excl. glasses)
-
- CPV Codes
38000000 - Laboratory, optical and precision equipments (excl. glasses)
Notice Value(s)
- Tender Value
- Not specified
- Lots Value
- Not specified
- Awards Value
- Not specified
- Contracts Value
- £339,352 £100K-£500K
Notice Dates
- Publication Date
- 1 Mar 20223 years ago
- Submission Deadline
- 14 Jan 2022Expired
- Future Notice Date
- Not specified
- Award Date
- 1 Mar 20223 years ago
- Contract Period
- Not specified - Not specified
- Recurrence
- Not specified
Notice Status
- Tender Status
- Complete
- Lots Status
- Complete
- Awards Status
- Not Specified
- Contracts Status
- Active
Buyer & Supplier
Contracting Authority (Buyer)
- Main Buyer
- CARDIFF UNIVERSITY
- Contact Name
- Not specified
- Contact Email
- halea3@cardiff.ac.uk
- Contact Phone
- +44 2920879648
Buyer Location
- Locality
- CARDIFF
- Postcode
- CF24 0DE
- Post Town
- Cardiff
- Country
- Wales
-
- Major Region (ITL 1)
- TLL Wales
- Basic Region (ITL 2)
- TLL5 South East Wales
- Small Region (ITL 3)
- TLL52 Cardiff and Vale of Glamorgan
- Delivery Location
- TLL22 Cardiff and Vale of Glamorgan
-
- Local Authority
- Cardiff
- Electoral Ward
- Adamsdown
- Westminster Constituency
- Cardiff East
Further Information
Notice Documents
-
https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=DEC381198
Photolithography Cluster - The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media. This tender is separated into 3 lots that will be referred to as: - Lot 1: Spin, bake & prime - Lot 2: Developer (TMAH) - Lot 3: Developer (Solvent) -
https://www.sell2wales.gov.wales/search/show/search_view.aspx?ID=MAR390518
Photolithography Cluster - The Institute for Compound Semiconductors (ICS) is in the process of constructing a new state of the art cleanroom facility that will be situated within the Cardiff University Translational Research Hub. This facility requires the capacity for 200 mm semiconductor wafer processing with a medium-scale pilot line throughput. One such capability is a comprehensive suite of lithography wet processing tools that includes, resist spinning, vapour priming, substrate baking, and puddle/spray development of exposed substrates using both TMAH and solvent based media. This tender is separated into 3 lots that will be referred to as: - Lot 1: Spin, bake & prime - Lot 2: Developer (TMAH) - Lot 3: Developer (Solvent)
Open Contracting Data Standard (OCDS)
View full OCDS Record for this contracting process
The Open Contracting Data Standard (OCDS) is a framework designed to increase transparency and access to public procurement data in the public sector. It is widely used by governments and organisations worldwide to report on procurement processes and contracts.
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