Award

School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System

UNIVERSITY OF ST ANDREWS

This public procurement record has 2 releases in its history.

Award

01 Jun 2021 at 00:00

Tender

22 Jan 2021 at 00:00

Summary of the contracting process

The University of St Andrews is procuring an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system to enhance its physics and astronomy research and teaching activities. This procurement is classified under the goods category and is currently in the Award stage, having been awarded on 25 May 2021. The submission for bids had ended on 24 February 2021. The chosen supplier for this contract is SENTECH Instruments GmbH, with a contract value of £273,125. Delivery is expected at the University’s location in St Andrews, UK.

This tender presents significant opportunities for growth, especially for SMEs in the scientific and technical equipment sector. Businesses that manufacture or supply advanced equipment for university research, particularly those specialising in etching systems and related components, would be well-suited to participate in similar future tenders. Engaging with the procurement process requires an understanding of the specific technical requirements and the experience of supplying educational institutions. Interested parties are encouraged to register and express their interest through the University’s electronic tendering system.

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Notice Title

School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System

Notice Description

The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.

Lot Information

Lot 1

We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for high quality etching (high etch rates, side wall angle control and low sidewall roughness) of - silicon, - silicon compounds (e.g. SiC, Si3N4), - compound III-V & compound II-VI semiconductors (e.g. AlGaInP, InGaP, AlGaAs, InP, GaAs, GaN, etc.), - dielectrics (e.g. ZnO2, TiO, ITO, Al2O3, ZrO2, etc.), - metals (e.g. Cr, Al, Ti, Au, W, Pt, etc.) and - organics (e.g. resists like SU8, S1818, etc and polymers like parylene, PS etc) containing an inductively coupled plasma (ICP) source for the generation of plasmas with high ion density, low ion energy and narrow energy distribution (ion energy and ion density are separately controllable via an included bias generator). The ICP-RIE etcher should be fully clean room-compatible. Wafers should be loaded into the etching chamber via a vacuum load lock for process stability, short process cycle times and safety issues. The substrate electrode should be He back-side cooled for dynamic, direct and very efficient temperature control of the substrate in a range of -20 degC to 150 degC, which may require the attachment of an external chiller (to be included in quotation). The etcher should be equipped with a laser interferometer to allow for live detection of the etching progress, and optionally also with an optical emission spectrometer for monitoring of chamber condition. The etcher should be compatible with fluorinated and chlorinated gases. The entire system should be operated from a PC (to be included in delivery).. All Tenders for the University of St Andrews are administered through our e-Tendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.

Publication & Lifecycle

Open Contracting ID
ocds-r6ebe6-0000641621
Publication Source
Public Contracts Scotland
Latest Notice
https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN416898
Current Stage
Award
All Stages
Tender, Award

Procurement Classification

Notice Type
OJEU - F3 - Contract Award Notice
Procurement Type
Standard
Procurement Category
Goods
Procurement Method
Open
Procurement Method Details
Open procedure
Tender Suitability
Not specified
Awardee Scale
SME

Common Procurement Vocabulary (CPV)

CPV Divisions

22 - Printed matter and related products

42 - Industrial machinery


CPV Codes

22520000 - Dry-etching equipment

42122450 - Vacuum pumps

42124300 - Parts of air or vacuum pumps, of air or gas compressors

Notice Value(s)

Tender Value
Not specified
Lots Value
Not specified
Awards Value
Not specified
Contracts Value
£273,125 £100K-£500K

Notice Dates

Publication Date
1 Jun 20214 years ago
Submission Deadline
24 Feb 2021Expired
Future Notice Date
Not specified
Award Date
25 May 20214 years ago
Contract Period
Not specified - Not specified
Recurrence
Not specified

Notice Status

Tender Status
Complete
Lots Status
Complete
Awards Status
Not Specified
Contracts Status
Active

Contracting Authority (Buyer)

Main Buyer
UNIVERSITY OF ST ANDREWS
Contact Name
Adrian Wood
Contact Email
procurement@st-andrews.ac.uk
Contact Phone
+44 1334462523

Buyer Location

Locality
GUARDBRIDGE
Postcode
KY16 0US
Post Town
Kirkcaldy
Country
Scotland

Major Region (ITL 1)
TLM Scotland
Basic Region (ITL 2)
TLM0 Eastern Scotland
Small Region (ITL 3)
TLM01 Clackmannanshire and Fife
Delivery Location
TLM72 Clackmannanshire and Fife

Local Authority
Fife
Electoral Ward
St Andrews
Westminster Constituency
North East Fife

Supplier Information

Number of Suppliers
1
Supplier Name

SENTECH INSTRUMENTS

Further Information

Notice Documents

Open Contracting Data Standard (OCDS)

View full OCDS Record for this contracting process

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The Open Contracting Data Standard (OCDS) is a framework designed to increase transparency and access to public procurement data in the public sector. It is widely used by governments and organisations worldwide to report on procurement processes and contracts.

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