Notice Information
Notice Title
School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System
Notice Description
The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.
Lot Information
Lot 1
We require an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system for high quality etching (high etch rates, side wall angle control and low sidewall roughness) of - silicon, - silicon compounds (e.g. SiC, Si3N4), - compound III-V & compound II-VI semiconductors (e.g. AlGaInP, InGaP, AlGaAs, InP, GaAs, GaN, etc.), - dielectrics (e.g. ZnO2, TiO, ITO, Al2O3, ZrO2, etc.), - metals (e.g. Cr, Al, Ti, Au, W, Pt, etc.) and - organics (e.g. resists like SU8, S1818, etc and polymers like parylene, PS etc) containing an inductively coupled plasma (ICP) source for the generation of plasmas with high ion density, low ion energy and narrow energy distribution (ion energy and ion density are separately controllable via an included bias generator). The ICP-RIE etcher should be fully clean room-compatible. Wafers should be loaded into the etching chamber via a vacuum load lock for process stability, short process cycle times and safety issues. The substrate electrode should be He back-side cooled for dynamic, direct and very efficient temperature control of the substrate in a range of -20 degC to 150 degC, which may require the attachment of an external chiller (to be included in quotation). The etcher should be equipped with a laser interferometer to allow for live detection of the etching progress, and optionally also with an optical emission spectrometer for monitoring of chamber condition. The etcher should be compatible with fluorinated and chlorinated gases. The entire system should be operated from a PC (to be included in delivery).. All Tenders for the University of St Andrews are administered through our e-Tendering System (InTend). To Express an Interest please go to our tender website at: https://intendhost.co.uk/universityofstandrews Please note that 'Notes of Interest' placed via PCS (Public Contracts Scotland) are not automatically accepted.
Notice Details
Publication & Lifecycle
- Open Contracting ID
- ocds-r6ebe6-0000641621
- Publication Source
- Public Contracts Scotland
- Latest Notice
- https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN416898
- Current Stage
- Award
- All Stages
- Tender, Award
Procurement Classification
- Notice Type
- OJEU - F3 - Contract Award Notice
- Procurement Type
- Standard
- Procurement Category
- Goods
- Procurement Method
- Open
- Procurement Method Details
- Open procedure
- Tender Suitability
- Not specified
- Awardee Scale
- SME
Common Procurement Vocabulary (CPV)
- CPV Divisions
-
- CPV Codes
22520000 - Dry-etching equipment
42122450 - Vacuum pumps
42124300 - Parts of air or vacuum pumps, of air or gas compressors
Notice Value(s)
- Tender Value
- Not specified
- Lots Value
- Not specified
- Awards Value
- Not specified
- Contracts Value
- £273,125 £100K-£500K
Notice Dates
- Publication Date
- 1 Jun 20215 years ago
- Submission Deadline
- 24 Feb 2021Expired
- Future Notice Date
- Not specified
- Award Date
- 25 May 20215 years ago
- Contract Period
- Not specified - Not specified
- Recurrence
- Not specified
Notice Status
- Tender Status
- Complete
- Lots Status
- Complete
- Awards Status
- Not Specified
- Contracts Status
- Active
Buyer & Supplier
Contracting Authority (Buyer)
- Main Buyer
- University of St Andrews
- Contact Name
- Available with D3 Tenders Premium →
- Contact Email
- Available with D3 Tenders Premium →
- Contact Phone
- Available with D3 Tenders Premium →
Buyer Location
- Locality
- GUARDBRIDGE
- Postcode
- KY16 9LB
- Postcode Area
- Kirkcaldy
- Country
- Scotland
-
- Major Region (ITL 1)
- TLM Scotland
- Basic Region (ITL 2)
- TLM0 Eastern Scotland
- Small Region (ITL 3)
- TLM01 Clackmannanshire and Fife
- Delivery Location
- TLM72 Clackmannanshire and Fife
-
- Local Authority
- Fife
- Electoral Ward
- St Andrews
- Westminster Constituency
- North East Fife
Further Information
Notice Documents
-
https://www.publiccontractsscotland.gov.uk/NoticeDownload/DownloadDocument.aspx?id=JAN404840&idx=1
22nd January 2021 - Portal Supplier Registration -
https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JAN404840
School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System - The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system. -
https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JUN416898
School of Physics & Astronomy: Inductively Coupled Plasma Reactive-Ion Etching System - The School of Physics & Astronomy is seeking to enhance its research and teaching activity through the acquisition of an Inductively Coupled Plasma Reactive-Ion Etching (ICP-RIE) system.
Open Contracting Data Standard (OCDS)
The Open Contracting Data Standard (OCDS) is a framework designed to increase transparency and access to public procurement data in the public sector. It is widely used by governments and organisations worldwide to report on procurement processes and contracts.